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题名:
Research on digital gray-tone projection lithography
作者: Wang Jian; Zhao Lixin; Yan WEi; Xu Wenxiang; Hu Song; Tang Xiaoping; Wang Zhaozhi; Wang Shurong; Zhang Zhengrong
出版日期: 2009
会议名称: Proceedings of SPIE
会议日期: 2009
通讯作者: Wang Jian
中文摘要: With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures.
英文摘要: With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures.
收录类别: Ei
语种: 英语
卷号: 7284
文章类型: 会议论文
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7634
Appears in Collections:微电子装备总体研究室(四室)_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Wang Jian,Zhao Lixin,Yan WEi,et al. Research on digital gray-tone projection lithography[C]. 见:Proceedings of SPIE. 2009.
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