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Research on digital gray-tone projection lithography
Wang Jian; Zhao Lixin; Yan WEi; Xu Wenxiang; Hu Song; Tang Xiaoping; Wang Zhaozhi; Wang Shurong; Zhang Zhengrong
Volume7284
2009
Language英语
Indexed ByEi
Subtype会议论文
AbstractWith the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures.; With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures.
Conference NameProceedings of SPIE
Conference Date2009
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7634
Collection微电子装备总体研究室(四室)
Corresponding AuthorWang Jian
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Wang Jian,Zhao Lixin,Yan WEi,et al. Research on digital gray-tone projection lithography[C],2009.
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