| 题名: | Research on digital gray-tone projection lithography |
| 作者: | Wang Jian; Zhao Lixin; Yan WEi; Xu Wenxiang; Hu Song; Tang Xiaoping; Wang Zhaozhi; Wang Shurong; Zhang Zhengrong
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| 出版日期: | 2009
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| 会议名称: | Proceedings of SPIE
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| 会议日期: | 2009
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| 通讯作者: | Wang Jian
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| 中文摘要: | With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures. |
| 英文摘要: | With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures. |
| 收录类别: | Ei
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| 语种: | 英语
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| 卷号: | 7284
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| 文章类型: | 会议论文
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| 内容类型: | 会议论文
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| URI标识: | http://ir.ioe.ac.cn/handle/181551/7634
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| Appears in Collections: | 微电子装备总体研究室（四室）_会议论文
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| 2009-223.pdf（467KB） | 会议论文 | -- | 限制开放 | | View
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| Recommended Citation: | |
Wang Jian,Zhao Lixin,Yan WEi,et al. Research on digital gray-tone projection lithography[C]. 见:Proceedings of SPIE. 2009.
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