| Research on digital gray-tone projection lithography | |
| Wang Jian; Zhao Lixin; Yan WEi; Xu Wenxiang; Hu Song; Tang Xiaoping; Wang Zhaozhi; Wang Shurong; Zhang Zhengrong | |
| Volume | 7284 |
| 2009 | |
| Language | 英语 |
| Indexed By | Ei |
| Subtype | 会议论文 |
| Abstract | With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures.; With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures. |
| Conference Name | Proceedings of SPIE |
| Conference Date | 2009 |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7634 |
| Collection | 微电子装备总体研究室（四室） |
| Corresponding Author | Wang Jian |
| Affiliation | 中国科学院光电技术研究所 |
| Recommended Citation GB/T 7714 | Wang Jian,Zhao Lixin,Yan WEi,et al. Research on digital gray-tone projection lithography[C],2009. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2009-223.pdf（467KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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