中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 微电子装备总体研究室(四室)  > 会议论文
题名:
Study on laser direct writing system for 32nm node
作者: Jiang Wenbo; Hu Song; Yang Yong; Zhao Lixin; Yan WEi; Zhou Shaolin; Chen Wangfu
出版日期: 2009
会议名称: Proceedings of SPIE
会议日期: 2009
通讯作者: Jiang Wenbo
中文摘要: In this paper, we present a novel laser direct writing system. Compared with conventional laser direct writing system, there are four key techniques in this system. They are illuminating system, leveling and focusing system, precise position work-stage system and diffractive focusing system. We introduce and analyze the four systems in this paper respectively. Through theoretic analysis and optical lithographic experiment, the results show that it provides a direction of higher resolution and lower cost optical lithographic technology. By proper design the structure of the whole system and the parameters of photon sieve, better resolution can be realized.
英文摘要: In this paper, we present a novel laser direct writing system. Compared with conventional laser direct writing system, there are four key techniques in this system. They are illuminating system, leveling and focusing system, precise position work-stage system and diffractive focusing system. We introduce and analyze the four systems in this paper respectively. Through theoretic analysis and optical lithographic experiment, the results show that it provides a direction of higher resolution and lower cost optical lithographic technology. By proper design the structure of the whole system and the parameters of photon sieve, better resolution can be realized.
收录类别: Ei
语种: 英语
卷号: 7284
文章类型: 会议论文
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7633
Appears in Collections:微电子装备总体研究室(四室)_会议论文

Files in This Item:
File Name/ File Size Content Type Version Access License
2009-221.pdf(995KB)会议论文--限制开放View 联系获取全文

作者单位: 中国科学院光电技术研究所

Recommended Citation:
Jiang Wenbo,Hu Song,Yang Yong,et al. Study on laser direct writing system for 32nm node[C]. 见:Proceedings of SPIE. 2009.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Jiang Wenbo]'s Articles
[Hu Song]'s Articles
[Yang Yong]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Jiang Wenbo]‘s Articles
[Hu Song]‘s Articles
[Yang Yong]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: 2009-221.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace