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Experimental study on absolute measurement of spherical surfaces with shift-rotation method based on Zernike polynomials
Song, Weihong; Hou, Xi; Wu, Fan; Wu, Shibin; Jing, Hongwei
Volume9446
Pages94463F
2015
Language英语
ISSN0277-786X
DOI10.1117/12.2181363
Indexed ByEi
Subtype会议论文
AbstractAbsolute testing methods have been widely employed in the accurate metrology of optical surface deviation. As a general method, the shift-rotation method requires several rotations and translations of the surface under test. And the surface deviation of the reference and the surface under test can be both calculated in terms of Zernike polynomials. The validity of the shift and rotation procedure was proved through experiments. Two different transmission spheres (with the same F number but different quality of the reference surfaces) were used to test the same spherical surface under test. The test results of the spherical surface under test are in good agreement. © 2015 SPIE.; Absolute testing methods have been widely employed in the accurate metrology of optical surface deviation. As a general method, the shift-rotation method requires several rotations and translations of the surface under test. And the surface deviation of the reference and the surface under test can be both calculated in terms of Zernike polynomials. The validity of the shift and rotation procedure was proved through experiments. Two different transmission spheres (with the same F number but different quality of the reference surfaces) were used to test the same spherical surface under test. The test results of the spherical surface under test are in good agreement. © 2015 SPIE.
Conference NameProceedings of SPIE: 9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014
Conference Date2015
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7629
Collection先光中心
Affiliation Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
Recommended Citation
GB/T 7714
Song, Weihong,Hou, Xi,Wu, Fan,et al. Experimental study on absolute measurement of spherical surfaces with shift-rotation method based on Zernike polynomials[C],2015:94463F.
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