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题名:
Experimental study on absolute measurement of spherical surfaces with shift-rotation method based on Zernike polynomials
作者: Song, Weihong; Hou, Xi; Wu, Fan; Wu, Shibin; Jing, Hongwei
出版日期: 2015
会议名称: Proceedings of SPIE: 9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014
会议日期: 2015
学科分类: Optical testing - Precision engineering - Rotation - Spheres
DOI: 10.1117/12.2181363
中文摘要: Absolute testing methods have been widely employed in the accurate metrology of optical surface deviation. As a general method, the shift-rotation method requires several rotations and translations of the surface under test. And the surface deviation of the reference and the surface under test can be both calculated in terms of Zernike polynomials. The validity of the shift and rotation procedure was proved through experiments. Two different transmission spheres (with the same F number but different quality of the reference surfaces) were used to test the same spherical surface under test. The test results of the spherical surface under test are in good agreement. © 2015 SPIE.
英文摘要: Absolute testing methods have been widely employed in the accurate metrology of optical surface deviation. As a general method, the shift-rotation method requires several rotations and translations of the surface under test. And the surface deviation of the reference and the surface under test can be both calculated in terms of Zernike polynomials. The validity of the shift and rotation procedure was proved through experiments. Two different transmission spheres (with the same F number but different quality of the reference surfaces) were used to test the same spherical surface under test. The test results of the spherical surface under test are in good agreement. © 2015 SPIE.
收录类别: Ei
语种: 英语
卷号: 9446
ISSN号: 0277-786X
文章类型: 会议论文
页码: 94463F
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7629
Appears in Collections:先光中心_会议论文

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作者单位: Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China

Recommended Citation:
Song, Weihong,Hou, Xi,Wu, Fan,et al. Experimental study on absolute measurement of spherical surfaces with shift-rotation method based on Zernike polynomials[C]. 见:Proceedings of SPIE: 9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014. 2015.
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