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题名:
Modeling Fizeau interferometer based on ray tracing with Zemax
作者: He, Yiwei1,2; Hou, Xi1; Wu, Yongqian1; Wu, Fan1; Quan, Haiyang1; Liu, Fengwei1
出版日期: 2015
会议名称: Proceedings of SPIE - The International Society for Optical Engineering
会议日期: 2015
学科分类: Error analysis - Errors - Interferometers - Laser optics - Optical testing - Surface measurement
DOI: 10.1117/12.2197612
通讯作者: He, Yiwei
中文摘要: A convenient method to study the influence of error sources in Fizeau is to build a ray-tracing model to simulate the error sources. In this paper an interferometer model is presented; an extension program is called to simulate the interference; and a preliminary research of several error sources is conducted. These examples demonstrate error analysis based on interferometer models is feasible and provide some guidance for optimizing our interferometer design. © 2015 SPIE.
英文摘要: A convenient method to study the influence of error sources in Fizeau is to build a ray-tracing model to simulate the error sources. In this paper an interferometer model is presented; an extension program is called to simulate the interference; and a preliminary research of several error sources is conducted. These examples demonstrate error analysis based on interferometer models is feasible and provide some guidance for optimizing our interferometer design. © 2015 SPIE.
收录类别: SCI ; Ei
语种: 英语
卷号: 9677
ISSN号: 0277-786X
文章类型: 会议论文
页码: 96771G
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7627
Appears in Collections:先光中心_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan, China
2. University of Chinese Academy of Sciences, Beijing, China

Recommended Citation:
He, Yiwei,Hou, Xi,Wu, Yongqian,et al. Modeling Fizeau interferometer based on ray tracing with Zemax[C]. 见:Proceedings of SPIE - The International Society for Optical Engineering. 2015.
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