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题名:
A sampling method to measure surface roughness of circular flat
作者: Meng, Kai1,2; Wan, Yongjian1; Wu, Fan1; Shen, Lijun1,2; Song, Weihong1,2
出版日期: 2014
会议名称: Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议日期: 2014
学科分类: Manufacture - Optical testing - Surface measurement
DOI: 10.1117/12.2073329
中文摘要: We propose a sampling method to measure surface roughness of circular flat in this paper. The steps of this method are described in following. First, the number of sampling points is determined based on the radius of the circular flat; then the sampling points are selected by a certain angle in helical line; at last we use instrument like white light interferometer to measure the surface roughness of these sample points. The sampling method can effectively use the surface roughness of sampling points to estimate the surface roughness of the overall optical surface. According to mathematic derivation and simulation analysis, this method has a good sampling results, thus it can be widely used to measure the surface roughness of the circular flat. © 2014 SPIE.
英文摘要: We propose a sampling method to measure surface roughness of circular flat in this paper. The steps of this method are described in following. First, the number of sampling points is determined based on the radius of the circular flat; then the sampling points are selected by a certain angle in helical line; at last we use instrument like white light interferometer to measure the surface roughness of these sample points. The sampling method can effectively use the surface roughness of sampling points to estimate the surface roughness of the overall optical surface. According to mathematic derivation and simulation analysis, this method has a good sampling results, thus it can be widely used to measure the surface roughness of the circular flat. © 2014 SPIE.
收录类别: Ei
语种: 英语
卷号: 9282
ISSN号: 0277786X
文章类型: 会议论文
页码: 92820J
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7624
Appears in Collections:先光中心_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. University of Chinese Academy of Sciences, Beijing, China

Recommended Citation:
Meng, Kai,Wan, Yongjian,Wu, Fan,et al. A sampling method to measure surface roughness of circular flat[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2014.
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