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A sampling method to measure surface roughness of circular flat
Meng, Kai1,2; Wan, Yongjian1; Wu, Fan1; Shen, Lijun1,2; Song, Weihong1,2
Volume9282
Pages92820J
2014
Language英语
ISSN0277786X
DOI10.1117/12.2073329
Indexed ByEi
Subtype会议论文
AbstractWe propose a sampling method to measure surface roughness of circular flat in this paper. The steps of this method are described in following. First, the number of sampling points is determined based on the radius of the circular flat; then the sampling points are selected by a certain angle in helical line; at last we use instrument like white light interferometer to measure the surface roughness of these sample points. The sampling method can effectively use the surface roughness of sampling points to estimate the surface roughness of the overall optical surface. According to mathematic derivation and simulation analysis, this method has a good sampling results, thus it can be widely used to measure the surface roughness of the circular flat. © 2014 SPIE.; We propose a sampling method to measure surface roughness of circular flat in this paper. The steps of this method are described in following. First, the number of sampling points is determined based on the radius of the circular flat; then the sampling points are selected by a certain angle in helical line; at last we use instrument like white light interferometer to measure the surface roughness of these sample points. The sampling method can effectively use the surface roughness of sampling points to estimate the surface roughness of the overall optical surface. According to mathematic derivation and simulation analysis, this method has a good sampling results, thus it can be widely used to measure the surface roughness of the circular flat. © 2014 SPIE.
Conference NameProceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Conference Date2014
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7624
Collection先光中心
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. University of Chinese Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
Meng, Kai,Wan, Yongjian,Wu, Fan,et al. A sampling method to measure surface roughness of circular flat[C],2014:92820J.
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