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The optical surface defect inspection by fringe reflection
Zhao, Wenchuan; Li, Lulu
Volume9282
Pages928210
2014
Language英语
ISSN0277786X
DOI10.1117/12.2071177
Indexed ByEi
Subtype会议论文
AbstractA method for the optical surface defects inspection based on fringe reflection is studied. The test system is composed of the fringe screen (a liquid crystal display, LCD), CCD camera and a computer. The intensity-modulated patterns are generated on the screens on both the horizontal and vertical directions respectively. The CCD records the pattern images via the tested surface. The phase and amplitude modulation are calculated by the phase-shifting technique. The defects location can be got from the amplitude modulation. Also the height of the defects can be gained by integration from the phase change caused by the defects. This method is simple and cheap. Compared with other techniques, this technique can get the three dimension information of the defects. The experimental results have confirmed the feasibility of this method. © 2014 SPIE.; A method for the optical surface defects inspection based on fringe reflection is studied. The test system is composed of the fringe screen (a liquid crystal display, LCD), CCD camera and a computer. The intensity-modulated patterns are generated on the screens on both the horizontal and vertical directions respectively. The CCD records the pattern images via the tested surface. The phase and amplitude modulation are calculated by the phase-shifting technique. The defects location can be got from the amplitude modulation. Also the height of the defects can be gained by integration from the phase change caused by the defects. This method is simple and cheap. Compared with other techniques, this technique can get the three dimension information of the defects. The experimental results have confirmed the feasibility of this method. © 2014 SPIE.
Conference NameProceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Conference Date2014
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7623
Collection先光中心
Corresponding AuthorZhao, Wenchuan
Affiliation Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
Recommended Citation
GB/T 7714
Zhao, Wenchuan,Li, Lulu. The optical surface defect inspection by fringe reflection[C],2014:928210.
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