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题名:
The optical surface defect inspection by fringe reflection
作者: Zhao, Wenchuan; Li, Lulu
出版日期: 2014
会议名称: Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议日期: 2014
学科分类: Amplitude modulation - CCD cameras - Liquid crystal displays - Manufacture - Modulation - Optical testing - Phase modulation - Phase shift
DOI: 10.1117/12.2071177
通讯作者: Zhao, Wenchuan
中文摘要: A method for the optical surface defects inspection based on fringe reflection is studied. The test system is composed of the fringe screen (a liquid crystal display, LCD), CCD camera and a computer. The intensity-modulated patterns are generated on the screens on both the horizontal and vertical directions respectively. The CCD records the pattern images via the tested surface. The phase and amplitude modulation are calculated by the phase-shifting technique. The defects location can be got from the amplitude modulation. Also the height of the defects can be gained by integration from the phase change caused by the defects. This method is simple and cheap. Compared with other techniques, this technique can get the three dimension information of the defects. The experimental results have confirmed the feasibility of this method. © 2014 SPIE.
英文摘要: A method for the optical surface defects inspection based on fringe reflection is studied. The test system is composed of the fringe screen (a liquid crystal display, LCD), CCD camera and a computer. The intensity-modulated patterns are generated on the screens on both the horizontal and vertical directions respectively. The CCD records the pattern images via the tested surface. The phase and amplitude modulation are calculated by the phase-shifting technique. The defects location can be got from the amplitude modulation. Also the height of the defects can be gained by integration from the phase change caused by the defects. This method is simple and cheap. Compared with other techniques, this technique can get the three dimension information of the defects. The experimental results have confirmed the feasibility of this method. © 2014 SPIE.
收录类别: Ei
语种: 英语
卷号: 9282
ISSN号: 0277786X
文章类型: 会议论文
页码: 928210
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7623
Appears in Collections:先光中心_会议论文

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作者单位: Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China

Recommended Citation:
Zhao, Wenchuan,Li, Lulu. The optical surface defect inspection by fringe reflection[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2014.
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