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Simultaneous phase-shifting interferometry study based on the common-path Fizeau Interferometer
Liu, Feng-Wei1,2; Wu, Yong-Qian1
Volume9282
Pages92821Z
2014
Language英语
ISSN0277786X
DOI10.1117/12.2070972
Indexed ByEi
Subtype会议论文
AbstractA simultaneous phase-shifting interferometry(SPSI) based on the common-path Fizeau interferometer has been discussed.In this system,two orthogonal polarized beams, using as the reference beam and test beam ,are detached by a particular Wollaston prism at a very small angle,then four equal sub-beams are achieved by a combination of three non-polarizing beam splitters(NPBS),and the phase shifts are introduced by four polarizers whose polarization azimuths are 0° ,45° ,90° ,135° with the horizontal direction respectively,the four phase shift interferograms are collected simultaneously by controlling the CCDs working at the same time .The SPSI principle is studied at first,then is the error analysis, finally we emulate the process of surface recovery by four steps phase shifts algorithm,the results indicate that, to ensure the feasibility of the SPSI system, we have to control the polarization azimuth error of the polarizer in ± 0.5°. © 2014 SPIE.; A simultaneous phase-shifting interferometry(SPSI) based on the common-path Fizeau interferometer has been discussed.In this system,two orthogonal polarized beams, using as the reference beam and test beam ,are detached by a particular Wollaston prism at a very small angle,then four equal sub-beams are achieved by a combination of three non-polarizing beam splitters(NPBS),and the phase shifts are introduced by four polarizers whose polarization azimuths are 0° ,45° ,90° ,135° with the horizontal direction respectively,the four phase shift interferograms are collected simultaneously by controlling the CCDs working at the same time .The SPSI principle is studied at first,then is the error analysis, finally we emulate the process of surface recovery by four steps phase shifts algorithm,the results indicate that, to ensure the feasibility of the SPSI system, we have to control the polarization azimuth error of the polarizer in ± 0.5°. © 2014 SPIE.
Conference NameProceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Conference Date2014
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7622
Collection先光中心
Corresponding AuthorLiu, Feng-Wei
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan, China
2. University of Chinese Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
Liu, Feng-Wei,Wu, Yong-Qian. Simultaneous phase-shifting interferometry study based on the common-path Fizeau Interferometer[C],2014:92821Z.
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