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题名:
Simultaneous phase-shifting interferometry study based on the common-path Fizeau Interferometer
作者: Liu, Feng-Wei1,2; Wu, Yong-Qian1
出版日期: 2014
会议名称: Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议日期: 2014
学科分类: Interferometers - Interferometry - Laser optics - Manufacture - Optical instruments - Optical testing - Phase shifters - Polarization - Prisms - Surface measurement
DOI: 10.1117/12.2070972
通讯作者: Liu, Feng-Wei
中文摘要: A simultaneous phase-shifting interferometry(SPSI) based on the common-path Fizeau interferometer has been discussed.In this system,two orthogonal polarized beams, using as the reference beam and test beam ,are detached by a particular Wollaston prism at a very small angle,then four equal sub-beams are achieved by a combination of three non-polarizing beam splitters(NPBS),and the phase shifts are introduced by four polarizers whose polarization azimuths are 0° ,45° ,90° ,135° with the horizontal direction respectively,the four phase shift interferograms are collected simultaneously by controlling the CCDs working at the same time .The SPSI principle is studied at first,then is the error analysis, finally we emulate the process of surface recovery by four steps phase shifts algorithm,the results indicate that, to ensure the feasibility of the SPSI system, we have to control the polarization azimuth error of the polarizer in ± 0.5°. © 2014 SPIE.
英文摘要: A simultaneous phase-shifting interferometry(SPSI) based on the common-path Fizeau interferometer has been discussed.In this system,two orthogonal polarized beams, using as the reference beam and test beam ,are detached by a particular Wollaston prism at a very small angle,then four equal sub-beams are achieved by a combination of three non-polarizing beam splitters(NPBS),and the phase shifts are introduced by four polarizers whose polarization azimuths are 0° ,45° ,90° ,135° with the horizontal direction respectively,the four phase shift interferograms are collected simultaneously by controlling the CCDs working at the same time .The SPSI principle is studied at first,then is the error analysis, finally we emulate the process of surface recovery by four steps phase shifts algorithm,the results indicate that, to ensure the feasibility of the SPSI system, we have to control the polarization azimuth error of the polarizer in ± 0.5°. © 2014 SPIE.
收录类别: Ei
语种: 英语
卷号: 9282
ISSN号: 0277786X
文章类型: 会议论文
页码: 92821Z
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7622
Appears in Collections:先光中心_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan, China
2. University of Chinese Academy of Sciences, Beijing, China

Recommended Citation:
Liu, Feng-Wei,Wu, Yong-Qian. Simultaneous phase-shifting interferometry study based on the common-path Fizeau Interferometer[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2014.
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