| 题名: | High accurate subaperture testing |
| 作者: | Yan, Fengtao1,2; Fan, Bin1; Hou, Xi1; Wu, Fan1; Lei, Baiping1
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| 出版日期: | 2014
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| 会议名称: | Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
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| 会议日期: | 2014
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| 学科分类: | Calibration - Data handling - Manufacture - Mirrors
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| DOI: | 10.1117/12.2068161
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| 中文摘要: | We introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are -0.80nm and -0.87nm. © 2014 SPIE. |
| 英文摘要: | We introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are -0.80nm and -0.87nm. © 2014 SPIE. |
| 收录类别: | Ei
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| 语种: | 英语
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| 卷号: | 9282
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| ISSN号: | 0277786X
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| 文章类型: | 会议论文
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| 页码: | 92822H
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| Citation statistics: |
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| 内容类型: | 会议论文
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| URI标识: | http://ir.ioe.ac.cn/handle/181551/7621
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| Appears in Collections: | 先光中心_会议论文
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| 2014-2136.pdf（410KB） | 会议论文 | -- | 限制开放 | | View
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作者单位: | 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. University of the Chinese Academy of Sciences, Beijing, China
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| Recommended Citation: | |
Yan, Fengtao,Fan, Bin,Hou, Xi,et al. High accurate subaperture testing[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2014.
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