| High accurate subaperture testing | |
| Yan, Fengtao1,2; Fan, Bin1; Hou, Xi1; Wu, Fan1; Lei, Baiping1 | |
| Volume | 9282 |
| Pages | 92822H |
| 2014 | |
| Language | 英语 |
| ISSN | 0277786X |
| DOI | 10.1117/12.2068161 |
| Indexed By | Ei |
| Subtype | 会议论文 |
| Abstract | We introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are -0.80nm and -0.87nm. © 2014 SPIE.; We introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are -0.80nm and -0.87nm. © 2014 SPIE. |
| Conference Name | Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment |
| Conference Date | 2014 |
| Citation statistics | |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7621 |
| Collection | 先光中心 |
| Affiliation | 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China 2. University of the Chinese Academy of Sciences, Beijing, China |
| Recommended Citation GB/T 7714 | Yan, Fengtao,Fan, Bin,Hou, Xi,et al. High accurate subaperture testing[C],2014:92822H. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2014-2136.pdf（410KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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