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High accurate subaperture testing
Yan, Fengtao1,2; Fan, Bin1; Hou, Xi1; Wu, Fan1; Lei, Baiping1
Volume9282
Pages92822H
2014
Language英语
ISSN0277786X
DOI10.1117/12.2068161
Indexed ByEi
Subtype会议论文
AbstractWe introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are -0.80nm and -0.87nm. © 2014 SPIE.; We introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are -0.80nm and -0.87nm. © 2014 SPIE.
Conference NameProceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Conference Date2014
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7621
Collection先光中心
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. University of the Chinese Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
Yan, Fengtao,Fan, Bin,Hou, Xi,et al. High accurate subaperture testing[C],2014:92822H.
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