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Removal of surface figure deformation due to gravity in optical test
Gu, Wei1,2,3; Wu, Fan1; Liu, Yong2; Hou, Xi1
Volume9282
Pages928209
2014
Language英语
ISSN0277786X
DOI10.1117/12.2069597
Indexed ByEi
Subtype会议论文
AbstractFor optical surface measurement with higher accuracy, a simple method for removing surface figure deformation due to gravity was adopted and its principle research and error analysis were conducted. Based on optical flat supporting case, properties of gravitational deformation of the tested sample was analyzed by finite element method (FEM). In order to verify high accuracy of FEM analysis, a method which could remove the original surface deviation of the reference and the tested from the test results was adopted. According to the method, difference between theoretical and experimental results represented by Root-Mean-Square (RMS) value was only 0.404 nm. The result shown that the FEM analysis is accurate enough and the surface figure deformation due to gravity could be removed from test results efficiently. The method discussed here could benefit the high accuracy optical measurement. © 2014 SPIE.; For optical surface measurement with higher accuracy, a simple method for removing surface figure deformation due to gravity was adopted and its principle research and error analysis were conducted. Based on optical flat supporting case, properties of gravitational deformation of the tested sample was analyzed by finite element method (FEM). In order to verify high accuracy of FEM analysis, a method which could remove the original surface deviation of the reference and the tested from the test results was adopted. According to the method, difference between theoretical and experimental results represented by Root-Mean-Square (RMS) value was only 0.404 nm. The result shown that the FEM analysis is accurate enough and the surface figure deformation due to gravity could be removed from test results efficiently. The method discussed here could benefit the high accuracy optical measurement. © 2014 SPIE.
Conference NameProceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Conference Date2014
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Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7620
Collection先光中心
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu, China
3. University of Chinese Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
Gu, Wei,Wu, Fan,Liu, Yong,et al. Removal of surface figure deformation due to gravity in optical test[C],2014:928209.
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