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题名:
Experimental study on the absolute measurement of flats
作者: Zhao, Wenchuan1; Song, Weihong2; Wu, Gaofeng1; Wu, Yongqian1
出版日期: 2014
会议名称: Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology
会议日期: 2014
学科分类: Optical image storage - Testing - Units of measurement
DOI: 10.1007/978-3-642-36359-7_88
中文摘要: We present an absolute method of shift-rotation to calibrate the flatness of flats. Compared with the conventional three-flat test method, the method requires only two flat and no flips of the flats. And there will be no sag errors introduced by gravity deformations because of the flips of flats. The details of the method are given out in the paper. With multi-rotational measurements and translation measurements, the surface deviation of flats can be obtained with the method. Experimental results are presented to show the availability of the absolute method. © Springer-Verlag Berlin Heidelberg 2014.
英文摘要: We present an absolute method of shift-rotation to calibrate the flatness of flats. Compared with the conventional three-flat test method, the method requires only two flat and no flips of the flats. And there will be no sag errors introduced by gravity deformations because of the flips of flats. The details of the method are given out in the paper. With multi-rotational measurements and translation measurements, the surface deviation of flats can be obtained with the method. Experimental results are presented to show the availability of the absolute method. © Springer-Verlag Berlin Heidelberg 2014.
收录类别: Ei
语种: 英语
文章类型: 会议论文
页码: 503-506
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7611
Appears in Collections:先光中心_会议论文

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作者单位: 1. Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, 610209, China
2. Chinese Academy of Sciences, Graduate University, Beijing, 100039, China

Recommended Citation:
Zhao, Wenchuan,Song, Weihong,Wu, Gaofeng,et al. Experimental study on the absolute measurement of flats[C]. 见:Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology. 2014.
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