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Experimental study on the absolute measurement of flats
Zhao, Wenchuan1; Song, Weihong2; Wu, Gaofeng1; Wu, Yongqian1
Pages503-506
2014
Language英语
DOI10.1007/978-3-642-36359-7_88
Indexed ByEi
Subtype会议论文
AbstractWe present an absolute method of shift-rotation to calibrate the flatness of flats. Compared with the conventional three-flat test method, the method requires only two flat and no flips of the flats. And there will be no sag errors introduced by gravity deformations because of the flips of flats. The details of the method are given out in the paper. With multi-rotational measurements and translation measurements, the surface deviation of flats can be obtained with the method. Experimental results are presented to show the availability of the absolute method. © Springer-Verlag Berlin Heidelberg 2014.; We present an absolute method of shift-rotation to calibrate the flatness of flats. Compared with the conventional three-flat test method, the method requires only two flat and no flips of the flats. And there will be no sag errors introduced by gravity deformations because of the flips of flats. The details of the method are given out in the paper. With multi-rotational measurements and translation measurements, the surface deviation of flats can be obtained with the method. Experimental results are presented to show the availability of the absolute method. © Springer-Verlag Berlin Heidelberg 2014.
Conference NameFringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology
Conference Date2014
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7611
Collection先光中心
Affiliation1. Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, 610209, China
2. Chinese Academy of Sciences, Graduate University, Beijing, 100039, China
Recommended Citation
GB/T 7714
Zhao, Wenchuan,Song, Weihong,Wu, Gaofeng,et al. Experimental study on the absolute measurement of flats[C],2014:503-506.
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