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Influence Factors of Optical Surface Roughness in Traditional Polishing Process
Shen Li-Jun; Wan Yong-Jian; Meng Kai; Shen, LJ (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
Volume9281
Pages92811Y
2014
Language英语
ISSN0277-786X
DOI10.1117/12.2073259
Subtype会议论文
AbstractReducing the optical surface roughness is the key to improve the polishing quality of optical mirrors. Traditional polishing technology in ultra-smooth polishing glass has been used widely for a long time. In this paper, the theories of traditional polishing in polishing process were summarized. The problems in polishing procedure were analyzed and the influence factors of optical surface roughness were provided according to the polishing procedure of optical mirrors, and the relative measurements were pointed out. During the factors, polishing slurry and polishing pad are the important ones. Contrasting with former traditional polishing technology, roughness factors of new polishing slurry and polishing pad were analyzed and used in polishing process. The optical mirror of emptyset246mm was polished in traditional technology with new polishing slurry and polishing pad, the obtained testing results were surface roughness 3.421nm before polishing and 0.613nm after polishing.; Reducing the optical surface roughness is the key to improve the polishing quality of optical mirrors. Traditional polishing technology in ultra-smooth polishing glass has been used widely for a long time. In this paper, the theories of traditional polishing in polishing process were summarized. The problems in polishing procedure were analyzed and the influence factors of optical surface roughness were provided according to the polishing procedure of optical mirrors, and the relative measurements were pointed out. During the factors, polishing slurry and polishing pad are the important ones. Contrasting with former traditional polishing technology, roughness factors of new polishing slurry and polishing pad were analyzed and used in polishing process. The optical mirror of emptyset246mm was polished in traditional technology with new polishing slurry and polishing pad, the obtained testing results were surface roughness 3.421nm before polishing and 0.613nm after polishing.
Conference NameProceedings of SPIE: 7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES
Conference Date2014
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7608
Collection先光中心
Corresponding AuthorShen, LJ (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
Affiliation1.[Shen Li-Jun
2.Wan Yong-Jian
3.Meng Kai] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
Recommended Citation
GB/T 7714
Shen Li-Jun,Wan Yong-Jian,Meng Kai,et al. Influence Factors of Optical Surface Roughness in Traditional Polishing Process[C],2014:92811Y.
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