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题名:
Experimental study on the absolute measurement of spherical surface with high accuracy
作者: Hou, Xi1; Song, Weihong1,2; Wu, Fan1; Lu, Liming1
出版日期: 2013
会议名称: Proceedings of SPIE: Eighth International Symposium on Precision Engineering Measurements and Instrumentation
会议日期: 2013
学科分类: Precision engineering - Spheres
DOI: 10.1117/12.2016642
通讯作者: Hou, X.
中文摘要: The absolute measurement of spherical surface with multiple relative measurements is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We present an experimental study on the different absolute methods of two-sphere, random-ball-averaging and shift-rotation to calibrate the spherical reference of a same transmission sphere with high accuracy. The experimental results show that the reference surface deviation measured with the different absolute methods agrees well with each other, with the fact that the difference of rms is ∼0.6nm. © 2013 SPIE.
英文摘要: The absolute measurement of spherical surface with multiple relative measurements is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We present an experimental study on the different absolute methods of two-sphere, random-ball-averaging and shift-rotation to calibrate the spherical reference of a same transmission sphere with high accuracy. The experimental results show that the reference surface deviation measured with the different absolute methods agrees well with each other, with the fact that the difference of rms is ∼0.6nm. © 2013 SPIE.
收录类别: Ei
语种: 英语
卷号: 8759
ISSN号: 0277786X
文章类型: 会议论文
页码: 87594M
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7602
Appears in Collections:先光中心_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China
2. Graduate University, Chinese Academy of Sciences, Beijing, 100039, China

Recommended Citation:
Hou, Xi,Song, Weihong,Wu, Fan,et al. Experimental study on the absolute measurement of spherical surface with high accuracy[C]. 见:Proceedings of SPIE: Eighth International Symposium on Precision Engineering Measurements and Instrumentation. 2013.
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