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Experimental study on the absolute measurement of spherical surface with high accuracy
Hou, Xi1; Song, Weihong1,2; Wu, Fan1; Lu, Liming1; Hou, X.
Volume8759
Pages87594M
2013
Language英语
ISSN0277786X
DOI10.1117/12.2016642
Indexed ByEi
Subtype会议论文
AbstractThe absolute measurement of spherical surface with multiple relative measurements is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We present an experimental study on the different absolute methods of two-sphere, random-ball-averaging and shift-rotation to calibrate the spherical reference of a same transmission sphere with high accuracy. The experimental results show that the reference surface deviation measured with the different absolute methods agrees well with each other, with the fact that the difference of rms is ∼0.6nm. © 2013 SPIE.; The absolute measurement of spherical surface with multiple relative measurements is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We present an experimental study on the different absolute methods of two-sphere, random-ball-averaging and shift-rotation to calibrate the spherical reference of a same transmission sphere with high accuracy. The experimental results show that the reference surface deviation measured with the different absolute methods agrees well with each other, with the fact that the difference of rms is ∼0.6nm. © 2013 SPIE.
Conference NameProceedings of SPIE: Eighth International Symposium on Precision Engineering Measurements and Instrumentation
Conference Date2013
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7602
Collection先光中心
Corresponding AuthorHou, X.
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China
2. Graduate University, Chinese Academy of Sciences, Beijing, 100039, China
Recommended Citation
GB/T 7714
Hou, Xi,Song, Weihong,Wu, Fan,et al. Experimental study on the absolute measurement of spherical surface with high accuracy[C],2013:87594M.
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