| Design and experiment of testing an off-axis aspheric surface by computer generated hologram | |
| Li, Shijie1,2; Wu, Fan1; Chen, Qiang1; Fan, Bin1; Li, Lianghong1 | |
| Volume | 8788 |
| Pages | 878833 |
| 2013 | |
| Language | 英语 |
| ISSN | 0277786X |
| DOI | 10.1117/12.2019345 |
| Indexed By | Ei |
| Subtype | 会议论文 |
| Abstract | To test an off-axis aspheric surface in high precision, a multiple combined computer generated hologram (CGH) is designed and fabrication. Multiple combined CGH which is a hologram including different areas with different purposes can not only measure off-axis aspheric surface, but also align every element in test system. The design methods of test CGH and alignment CGH were deduced in detail. Ray trace and B-spline were used to devise test CGH, reflection CGH was used to align interferometer and CGH, and hologram alignment mark was used to align CGH and off-axis aspheric surface. A design example was given to test an off-axis paraboloid with 50mm aperture and 35mm off-axis distance. Meanwhile, this CGH was fabricated and this paraboloid was measured by it. The test result (PV=0.305λiŒRMS=0.042λ) is matched well with the outcome verified by autocollimation (PV=0. 320λiŒRMS=0.043λ). At last, we analyzed and solved the noise in the CGH test result. It proves that these designs are correct and this method can test off-axis aspheric surface in high precision. © 2013 SPIE.; To test an off-axis aspheric surface in high precision, a multiple combined computer generated hologram (CGH) is designed and fabrication. Multiple combined CGH which is a hologram including different areas with different purposes can not only measure off-axis aspheric surface, but also align every element in test system. The design methods of test CGH and alignment CGH were deduced in detail. Ray trace and B-spline were used to devise test CGH, reflection CGH was used to align interferometer and CGH, and hologram alignment mark was used to align CGH and off-axis aspheric surface. A design example was given to test an off-axis paraboloid with 50mm aperture and 35mm off-axis distance. Meanwhile, this CGH was fabricated and this paraboloid was measured by it. The test result (PV=0.305λiŒRMS=0.042λ) is matched well with the outcome verified by autocollimation (PV=0. 320λiŒRMS=0.043λ). At last, we analyzed and solved the noise in the CGH test result. It proves that these designs are correct and this method can test off-axis aspheric surface in high precision. © 2013 SPIE. |
| Conference Name | Proceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII |
| Conference Date | 2013 |
| Citation statistics | |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7601 |
| Collection | 先光中心 |
| Affiliation | 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2. University of Chinese Academy of Sciences, Beijing 100049, China |
| Recommended Citation GB/T 7714 | Li, Shijie,Wu, Fan,Chen, Qiang,et al. Design and experiment of testing an off-axis aspheric surface by computer generated hologram[C],2013:878833. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2013-2070.pdf（992KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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