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Design and experiment of testing an off-axis aspheric surface by computer generated hologram
Li, Shijie1,2; Wu, Fan1; Chen, Qiang1; Fan, Bin1; Li, Lianghong1
Volume8788
Pages878833
2013
Language英语
ISSN0277786X
DOI10.1117/12.2019345
Indexed ByEi
Subtype会议论文
AbstractTo test an off-axis aspheric surface in high precision, a multiple combined computer generated hologram (CGH) is designed and fabrication. Multiple combined CGH which is a hologram including different areas with different purposes can not only measure off-axis aspheric surface, but also align every element in test system. The design methods of test CGH and alignment CGH were deduced in detail. Ray trace and B-spline were used to devise test CGH, reflection CGH was used to align interferometer and CGH, and hologram alignment mark was used to align CGH and off-axis aspheric surface. A design example was given to test an off-axis paraboloid with 50mm aperture and 35mm off-axis distance. Meanwhile, this CGH was fabricated and this paraboloid was measured by it. The test result (PV=0.305λiŒRMS=0.042λ) is matched well with the outcome verified by autocollimation (PV=0. 320λiŒRMS=0.043λ). At last, we analyzed and solved the noise in the CGH test result. It proves that these designs are correct and this method can test off-axis aspheric surface in high precision. © 2013 SPIE.; To test an off-axis aspheric surface in high precision, a multiple combined computer generated hologram (CGH) is designed and fabrication. Multiple combined CGH which is a hologram including different areas with different purposes can not only measure off-axis aspheric surface, but also align every element in test system. The design methods of test CGH and alignment CGH were deduced in detail. Ray trace and B-spline were used to devise test CGH, reflection CGH was used to align interferometer and CGH, and hologram alignment mark was used to align CGH and off-axis aspheric surface. A design example was given to test an off-axis paraboloid with 50mm aperture and 35mm off-axis distance. Meanwhile, this CGH was fabricated and this paraboloid was measured by it. The test result (PV=0.305λiŒRMS=0.042λ) is matched well with the outcome verified by autocollimation (PV=0. 320λiŒRMS=0.043λ). At last, we analyzed and solved the noise in the CGH test result. It proves that these designs are correct and this method can test off-axis aspheric surface in high precision. © 2013 SPIE.
Conference NameProceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII
Conference Date2013
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7601
Collection先光中心
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100049, China
Recommended Citation
GB/T 7714
Li, Shijie,Wu, Fan,Chen, Qiang,et al. Design and experiment of testing an off-axis aspheric surface by computer generated hologram[C],2013:878833.
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