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题名:
Design and experiment of testing an off-axis aspheric surface by computer generated hologram
作者: Li, Shijie1,2; Wu, Fan1; Chen, Qiang1; Fan, Bin1; Li, Lianghong1
出版日期: 2013
会议名称: Proceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII
会议日期: 2013
学科分类: Aspherics - Holograms - Interpolation - Lithography - Optical data processing - Optical design - Optical testing - Optical variables measurement
DOI: 10.1117/12.2019345
中文摘要: To test an off-axis aspheric surface in high precision, a multiple combined computer generated hologram (CGH) is designed and fabrication. Multiple combined CGH which is a hologram including different areas with different purposes can not only measure off-axis aspheric surface, but also align every element in test system. The design methods of test CGH and alignment CGH were deduced in detail. Ray trace and B-spline were used to devise test CGH, reflection CGH was used to align interferometer and CGH, and hologram alignment mark was used to align CGH and off-axis aspheric surface. A design example was given to test an off-axis paraboloid with 50mm aperture and 35mm off-axis distance. Meanwhile, this CGH was fabricated and this paraboloid was measured by it. The test result (PV=0.305λiŒRMS=0.042λ) is matched well with the outcome verified by autocollimation (PV=0. 320λiŒRMS=0.043λ). At last, we analyzed and solved the noise in the CGH test result. It proves that these designs are correct and this method can test off-axis aspheric surface in high precision. © 2013 SPIE.
英文摘要: To test an off-axis aspheric surface in high precision, a multiple combined computer generated hologram (CGH) is designed and fabrication. Multiple combined CGH which is a hologram including different areas with different purposes can not only measure off-axis aspheric surface, but also align every element in test system. The design methods of test CGH and alignment CGH were deduced in detail. Ray trace and B-spline were used to devise test CGH, reflection CGH was used to align interferometer and CGH, and hologram alignment mark was used to align CGH and off-axis aspheric surface. A design example was given to test an off-axis paraboloid with 50mm aperture and 35mm off-axis distance. Meanwhile, this CGH was fabricated and this paraboloid was measured by it. The test result (PV=0.305λiŒRMS=0.042λ) is matched well with the outcome verified by autocollimation (PV=0. 320λiŒRMS=0.043λ). At last, we analyzed and solved the noise in the CGH test result. It proves that these designs are correct and this method can test off-axis aspheric surface in high precision. © 2013 SPIE.
收录类别: Ei
语种: 英语
卷号: 8788
ISSN号: 0277786X
文章类型: 会议论文
页码: 878833
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7601
Appears in Collections:先光中心_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100049, China

Recommended Citation:
Li, Shijie,Wu, Fan,Chen, Qiang,et al. Design and experiment of testing an off-axis aspheric surface by computer generated hologram[C]. 见:Proceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII. 2013.
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