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Optical surface measurement using phase retrieval hybrid algorithm based on diffraction angular spectrum theory
Feng, Liang1,2; Zeng, Zhi-Ge1; Wu, Yong-Qian1
Volume8911
Pages891111
2013
Language英语
ISSN0277786X
DOI10.1117/12.2035185
Indexed ByEi
Subtype会议论文
AbstractIn order to test the high dynamic range error beyond one wavelength after the rough polish process, we design a phase retrieval hybrid algorithm based on diffraction angular spectrum theory. Phase retrieval is a wave front sensing method that uses the intensity distribution to reconstruct the phase distribution of optical field. Phase retrieval is established on the model of diffractive propagation and approach the real intensity distribution gradually. In this paper, we introduce the basic principle and challenges of optical surface measurement using phase retrieval, then discuss the major parts of phase retrieval: diffractive propagation and hybrid algorithm. The angular spectrum theory describes the diffractive propagation in the frequency domain instead of spatial domain, which simplifies the computation greatly. Through the theoretical analysis, the angular spectrum in discrete form is more effective when the high frequency part values less and the diffractive distance isn't far. The phase retrieval hybrid algorithm derives from modified GS algorithm and conjugate gradient method, aiming to solve the problem of phase wrapping caused by the high dynamic range error. In the algorithm, phase distribution is described by Zernike polynomials and the coefficients of Zernike polynomials are optimized by the hybrid algorithm. Simulation results show that the retrieved phase distribution and real phase distribution are quite contiguous for the high dynamic range error beyond λ. © 2013 SPIE.; In order to test the high dynamic range error beyond one wavelength after the rough polish process, we design a phase retrieval hybrid algorithm based on diffraction angular spectrum theory. Phase retrieval is a wave front sensing method that uses the intensity distribution to reconstruct the phase distribution of optical field. Phase retrieval is established on the model of diffractive propagation and approach the real intensity distribution gradually. In this paper, we introduce the basic principle and challenges of optical surface measurement using phase retrieval, then discuss the major parts of phase retrieval: diffractive propagation and hybrid algorithm. The angular spectrum theory describes the diffractive propagation in the frequency domain instead of spatial domain, which simplifies the computation greatly. Through the theoretical analysis, the angular spectrum in discrete form is more effective when the high frequency part values less and the diffractive distance isn't far. The phase retrieval hybrid algorithm derives from modified GS algorithm and conjugate gradient method, aiming to solve the problem of phase wrapping caused by the high dynamic range error. In the algorithm, phase distribution is described by Zernike polynomials and the coefficients of Zernike polynomials are optimized by the hybrid algorithm. Simulation results show that the retrieved phase distribution and real phase distribution are quite contiguous for the high dynamic range error beyond λ. © 2013 SPIE.
Conference NameProceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications
Conference Date2013
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7599
Collection先光中心
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing, 100049, China
Recommended Citation
GB/T 7714
Feng, Liang,Zeng, Zhi-Ge,Wu, Yong-Qian. Optical surface measurement using phase retrieval hybrid algorithm based on diffraction angular spectrum theory[C],2013:891111.
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