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Experimental study on virtual spatially extended source
Xu, Yan1,2; Wan, Yongjian1; Wu, Yongqian1; Xu, Y.
Volume8417
Pages84173X
2012
Language英语
ISSN0277786X
DOI10.1117/12.977333
Indexed ByEi
Subtype会议论文
AbstractOne of the most important factor in influencing interferometer measurement accuracy is coherent noise.To improve measurement accuracy, the coherent noise of interferometric system should be reduced effectively. A new method of generating virtually extended source is described in this paper, which can suppress coherent noise effectively and verified by experiment. Experiments of comparing with traditional point source show that the virtually extended source can suppress coherent noise effectively and preserve the fringe contrast. There is no Newton rings in the phase map in evidence. The experiments show the wedge angle to be chosen between 8 minutes and 17minutes for a better results. The final measurement about surface profile show the method with virtually extended source has lower RMS value. © 2012 SPIE.; One of the most important factor in influencing interferometer measurement accuracy is coherent noise.To improve measurement accuracy, the coherent noise of interferometric system should be reduced effectively. A new method of generating virtually extended source is described in this paper, which can suppress coherent noise effectively and verified by experiment. Experiments of comparing with traditional point source show that the virtually extended source can suppress coherent noise effectively and preserve the fringe contrast. There is no Newton rings in the phase map in evidence. The experiments show the wedge angle to be chosen between 8 minutes and 17minutes for a better results. The final measurement about surface profile show the method with virtually extended source has lower RMS value. © 2012 SPIE.
Conference NameProceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7598
Collection先光中心
Corresponding AuthorXu, Y.
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate School, Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Xu, Yan,Wan, Yongjian,Wu, Yongqian,et al. Experimental study on virtual spatially extended source[C],2012:84173X.
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