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题名:
Experimental study on virtual spatially extended source
作者: Xu, Yan1,2; Wan, Yongjian1; Wu, Yongqian1
出版日期: 2012
会议名称: Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议日期: 2012
DOI: 10.1117/12.977333
通讯作者: Xu, Y.
中文摘要: One of the most important factor in influencing interferometer measurement accuracy is coherent noise.To improve measurement accuracy, the coherent noise of interferometric system should be reduced effectively. A new method of generating virtually extended source is described in this paper, which can suppress coherent noise effectively and verified by experiment. Experiments of comparing with traditional point source show that the virtually extended source can suppress coherent noise effectively and preserve the fringe contrast. There is no Newton rings in the phase map in evidence. The experiments show the wedge angle to be chosen between 8 minutes and 17minutes for a better results. The final measurement about surface profile show the method with virtually extended source has lower RMS value. © 2012 SPIE.
英文摘要: One of the most important factor in influencing interferometer measurement accuracy is coherent noise.To improve measurement accuracy, the coherent noise of interferometric system should be reduced effectively. A new method of generating virtually extended source is described in this paper, which can suppress coherent noise effectively and verified by experiment. Experiments of comparing with traditional point source show that the virtually extended source can suppress coherent noise effectively and preserve the fringe contrast. There is no Newton rings in the phase map in evidence. The experiments show the wedge angle to be chosen between 8 minutes and 17minutes for a better results. The final measurement about surface profile show the method with virtually extended source has lower RMS value. © 2012 SPIE.
收录类别: Ei
语种: 英语
卷号: 8417
ISSN号: 0277786X
文章类型: 会议论文
页码: 84173X
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7598
Appears in Collections:先光中心_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate School, Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Xu, Yan,Wan, Yongjian,Wu, Yongqian. Experimental study on virtual spatially extended source[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2012.
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