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Computer-aided alignment of off-axis two-mirror reflective system
Wang, Bin1,2,3; Wu, Fan1; Ye, Yu Tang3; Wang, B.
Volume8417
Pages84171S
2012
Language英语
ISSN0277786X
DOI10.1117/12.978174
Indexed ByEi
Subtype会议论文
AbstractTo realize the fast, efficient alignment of off-axis two-mirror reflective system, the scheme of computer-aided alignment has been proposed. The misalignment state of the system has been simulated in Zemax, corresponding relationship between the misalignments and Zernike polynomial coefficients has been analyzed and the misalignment characteristics of the system have been summarized by Matlab. Finally, the alignment scheme was determined by analysis. In order to verify the scheme, an off-axis two-mirror reflective system has been aligned according to the value which was calculated in accordance with the alignment scheme. The result demonstrates that the alignment scheme is feasible to the system. © 2012 SPIE.; To realize the fast, efficient alignment of off-axis two-mirror reflective system, the scheme of computer-aided alignment has been proposed. The misalignment state of the system has been simulated in Zemax, corresponding relationship between the misalignments and Zernike polynomial coefficients has been analyzed and the misalignment characteristics of the system have been summarized by Matlab. Finally, the alignment scheme was determined by analysis. In order to verify the scheme, an off-axis two-mirror reflective system has been aligned according to the value which was calculated in accordance with the alignment scheme. The result demonstrates that the alignment scheme is feasible to the system. © 2012 SPIE.
Conference NameProceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7597
Collection先光中心
Corresponding AuthorWang, B.
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Science, Chengdu 610209, China
2. Graduate University, Chinese Academy of Sciences, Beijing 100049, China
3. University of Electronic Science and Technology of China, Chengdu 610054, China
Recommended Citation
GB/T 7714
Wang, Bin,Wu, Fan,Ye, Yu Tang,et al. Computer-aided alignment of off-axis two-mirror reflective system[C],2012:84171S.
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