| Optomechanical structural design and analysis of 300mm aperture reference spherical lens | |
| Wang, Baoxu1,3; Wu, Fan1; Jiang, Shilei2; Zhang, Can1; Wang, B. | |
| Volume | 8417 |
| Pages | 84171U |
| 2012 | |
| Language | 英语 |
| ISSN | 0277786X |
| DOI | 10.1117/12.2009288 |
| Indexed By | Ei |
| Subtype | 会议论文 |
| Abstract | Reference spherical lens is a critical component of Fizeau interferometer. Its reference sphere provides the reference wavefront for optics figure measurement. In order to ensure the measuring precision, the PV value of the reference sphere should be higher than λ1 0. Consequently, the deformations of the reference sphere lens due to gravity and temperature variation must be strictly controlled. Optomechanical structure was designed for the reference sphere lens with an effective aperture of 300mimThen finite element method (FEM) was used to analyze the surface deformations of the lens. Optical system Modulation Transfer Function (MTF) and wavefront error were calculated by using Zemike coefficients to evaluate the image quality under gravitational conditions. © 2012 SPIE.; Reference spherical lens is a critical component of Fizeau interferometer. Its reference sphere provides the reference wavefront for optics figure measurement. In order to ensure the measuring precision, the PV value of the reference sphere should be higher than λ1 0. Consequently, the deformations of the reference sphere lens due to gravity and temperature variation must be strictly controlled. Optomechanical structure was designed for the reference sphere lens with an effective aperture of 300mimThen finite element method (FEM) was used to analyze the surface deformations of the lens. Optical system Modulation Transfer Function (MTF) and wavefront error were calculated by using Zemike coefficients to evaluate the image quality under gravitational conditions. © 2012 SPIE. |
| Conference Name | Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment |
| Conference Date | 2012 |
| Citation statistics | |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7596 |
| Collection | 先光中心 |
| Corresponding Author | Wang, B. |
| Affiliation | 1. Instite of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2. Xian Technological University, Xi'an 710032, China 3. Graduate School, Chinese Academy of Sciences, Beijing 100039, China |
| Recommended Citation GB/T 7714 | Wang, Baoxu,Wu, Fan,Jiang, Shilei,et al. Optomechanical structural design and analysis of 300mm aperture reference spherical lens[C],2012:84171U. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2012-2135.pdf（163KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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