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Optomechanical structural design and analysis of 300mm aperture reference spherical lens
Wang, Baoxu1,3; Wu, Fan1; Jiang, Shilei2; Zhang, Can1; Wang, B.
Volume8417
Pages84171U
2012
Language英语
ISSN0277786X
DOI10.1117/12.2009288
Indexed ByEi
Subtype会议论文
AbstractReference spherical lens is a critical component of Fizeau interferometer. Its reference sphere provides the reference wavefront for optics figure measurement. In order to ensure the measuring precision, the PV value of the reference sphere should be higher than λ1 0. Consequently, the deformations of the reference sphere lens due to gravity and temperature variation must be strictly controlled. Optomechanical structure was designed for the reference sphere lens with an effective aperture of 300mimThen finite element method (FEM) was used to analyze the surface deformations of the lens. Optical system Modulation Transfer Function (MTF) and wavefront error were calculated by using Zemike coefficients to evaluate the image quality under gravitational conditions. © 2012 SPIE.; Reference spherical lens is a critical component of Fizeau interferometer. Its reference sphere provides the reference wavefront for optics figure measurement. In order to ensure the measuring precision, the PV value of the reference sphere should be higher than λ1 0. Consequently, the deformations of the reference sphere lens due to gravity and temperature variation must be strictly controlled. Optomechanical structure was designed for the reference sphere lens with an effective aperture of 300mimThen finite element method (FEM) was used to analyze the surface deformations of the lens. Optical system Modulation Transfer Function (MTF) and wavefront error were calculated by using Zemike coefficients to evaluate the image quality under gravitational conditions. © 2012 SPIE.
Conference NameProceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7596
Collection先光中心
Corresponding AuthorWang, B.
Affiliation1. Instite of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Xian Technological University, Xi'an 710032, China
3. Graduate School, Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Wang, Baoxu,Wu, Fan,Jiang, Shilei,et al. Optomechanical structural design and analysis of 300mm aperture reference spherical lens[C],2012:84171U.
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