| 题名: | Optomechanical structural design and analysis of 300mm aperture reference spherical lens |
| 作者: | Wang, Baoxu1,3; Wu, Fan1; Jiang, Shilei2; Zhang, Can1
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| 出版日期: | 2012
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| 会议名称: | Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
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| 会议日期: | 2012
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| DOI: | 10.1117/12.2009288
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| 通讯作者: | Wang, B.
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| 中文摘要: | Reference spherical lens is a critical component of Fizeau interferometer. Its reference sphere provides the reference wavefront for optics figure measurement. In order to ensure the measuring precision, the PV value of the reference sphere should be higher than λ1 0. Consequently, the deformations of the reference sphere lens due to gravity and temperature variation must be strictly controlled. Optomechanical structure was designed for the reference sphere lens with an effective aperture of 300mimThen finite element method (FEM) was used to analyze the surface deformations of the lens. Optical system Modulation Transfer Function (MTF) and wavefront error were calculated by using Zemike coefficients to evaluate the image quality under gravitational conditions. © 2012 SPIE. |
| 英文摘要: | Reference spherical lens is a critical component of Fizeau interferometer. Its reference sphere provides the reference wavefront for optics figure measurement. In order to ensure the measuring precision, the PV value of the reference sphere should be higher than λ1 0. Consequently, the deformations of the reference sphere lens due to gravity and temperature variation must be strictly controlled. Optomechanical structure was designed for the reference sphere lens with an effective aperture of 300mimThen finite element method (FEM) was used to analyze the surface deformations of the lens. Optical system Modulation Transfer Function (MTF) and wavefront error were calculated by using Zemike coefficients to evaluate the image quality under gravitational conditions. © 2012 SPIE. |
| 收录类别: | Ei
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| 语种: | 英语
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| 卷号: | 8417
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| ISSN号: | 0277786X
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| 文章类型: | 会议论文
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| 页码: | 84171U
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| Citation statistics: |
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| 内容类型: | 会议论文
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| URI标识: | http://ir.ioe.ac.cn/handle/181551/7596
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| Appears in Collections: | 先光中心_会议论文
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作者单位: | 1. Instite of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Xian Technological University, Xi'an 710032, China
3. Graduate School, Chinese Academy of Sciences, Beijing 100039, China
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| Recommended Citation: | |
Wang, Baoxu,Wu, Fan,Jiang, Shilei,et al. Optomechanical structural design and analysis of 300mm aperture reference spherical lens[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2012.
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