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题名:
Experimental study on absolute test of spherical surfaces with shift-rotation method
作者: Song, Weihong1,2; Wu, Fan1; Hou, Xi1
出版日期: 2012
会议名称: Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议日期: 2012
DOI: 10.1117/12.974971
通讯作者: Song, W.
中文摘要: Absolute test of spherical surfaces has been widely used because of increased demand on metrology accuracy. We demonstrate the validity of an absolute test method with shift and rotation procedure that has been proposed earlier. The method relies on the decomposition of the surface deviations into rotationally asymmetric and symmetric components. The surface deviation measured with the absolute test method of shift-rotation agrees well with that of two-sphere method. The difference of rms is ∼0.4nm while the PV is very sensitive to environmental effects. © 2012 SPIE.
英文摘要: Absolute test of spherical surfaces has been widely used because of increased demand on metrology accuracy. We demonstrate the validity of an absolute test method with shift and rotation procedure that has been proposed earlier. The method relies on the decomposition of the surface deviations into rotationally asymmetric and symmetric components. The surface deviation measured with the absolute test method of shift-rotation agrees well with that of two-sphere method. The difference of rms is ∼0.4nm while the PV is very sensitive to environmental effects. © 2012 SPIE.
收录类别: Ei
语种: 英语
卷号: 8417
ISSN号: 0277786X
文章类型: 会议论文
页码: 84172A
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7595
Appears in Collections:先光中心_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Science, Chengdu, 610209, China
2. Graduate University, Chinese Academy of Sciences, Beijing, 100039, China

Recommended Citation:
Song, Weihong,Wu, Fan,Hou, Xi. Experimental study on absolute test of spherical surfaces with shift-rotation method[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2012.
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