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Experimental study on absolute test of spherical surfaces with shift-rotation method
Song, Weihong1,2; Wu, Fan1; Hou, Xi1; Song, W.
Volume8417
Pages84172A
2012
Language英语
ISSN0277786X
DOI10.1117/12.974971
Indexed ByEi
Subtype会议论文
AbstractAbsolute test of spherical surfaces has been widely used because of increased demand on metrology accuracy. We demonstrate the validity of an absolute test method with shift and rotation procedure that has been proposed earlier. The method relies on the decomposition of the surface deviations into rotationally asymmetric and symmetric components. The surface deviation measured with the absolute test method of shift-rotation agrees well with that of two-sphere method. The difference of rms is ∼0.4nm while the PV is very sensitive to environmental effects. © 2012 SPIE.; Absolute test of spherical surfaces has been widely used because of increased demand on metrology accuracy. We demonstrate the validity of an absolute test method with shift and rotation procedure that has been proposed earlier. The method relies on the decomposition of the surface deviations into rotationally asymmetric and symmetric components. The surface deviation measured with the absolute test method of shift-rotation agrees well with that of two-sphere method. The difference of rms is ∼0.4nm while the PV is very sensitive to environmental effects. © 2012 SPIE.
Conference NameProceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7595
Collection先光中心
Corresponding AuthorSong, W.
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Science, Chengdu, 610209, China
2. Graduate University, Chinese Academy of Sciences, Beijing, 100039, China
Recommended Citation
GB/T 7714
Song, Weihong,Wu, Fan,Hou, Xi,et al. Experimental study on absolute test of spherical surfaces with shift-rotation method[C],2012:84172A.
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