| Experimental study on absolute test of spherical surfaces with shift-rotation method | |
| Song, Weihong1,2; Wu, Fan1; Hou, Xi1; Song, W. | |
| Volume | 8417 |
| Pages | 84172A |
| 2012 | |
| Language | 英语 |
| ISSN | 0277786X |
| DOI | 10.1117/12.974971 |
| Indexed By | Ei |
| Subtype | 会议论文 |
| Abstract | Absolute test of spherical surfaces has been widely used because of increased demand on metrology accuracy. We demonstrate the validity of an absolute test method with shift and rotation procedure that has been proposed earlier. The method relies on the decomposition of the surface deviations into rotationally asymmetric and symmetric components. The surface deviation measured with the absolute test method of shift-rotation agrees well with that of two-sphere method. The difference of rms is ∼0.4nm while the PV is very sensitive to environmental effects. © 2012 SPIE.; Absolute test of spherical surfaces has been widely used because of increased demand on metrology accuracy. We demonstrate the validity of an absolute test method with shift and rotation procedure that has been proposed earlier. The method relies on the decomposition of the surface deviations into rotationally asymmetric and symmetric components. The surface deviation measured with the absolute test method of shift-rotation agrees well with that of two-sphere method. The difference of rms is ∼0.4nm while the PV is very sensitive to environmental effects. © 2012 SPIE. |
| Conference Name | Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment |
| Conference Date | 2012 |
| Citation statistics | |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7595 |
| Collection | 先光中心 |
| Corresponding Author | Song, W. |
| Affiliation | 1. Institute of Optics and Electronics, Chinese Academy of Science, Chengdu, 610209, China 2. Graduate University, Chinese Academy of Sciences, Beijing, 100039, China |
| Recommended Citation GB/T 7714 | Song, Weihong,Wu, Fan,Hou, Xi,et al. Experimental study on absolute test of spherical surfaces with shift-rotation method[C],2012:84172A. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2012-2134.pdf（1402KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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