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题名:
Analysis and experiment of random ball test
作者: Lu, Liming1,2; Wu, Fan1; Hou, Xi1; Zhang, Can1
出版日期: 2012
会议名称: Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议日期: 2012
DOI: 10.1117/12.971456
通讯作者: Lu, L.
中文摘要: Robert E.Parks from National Institute of Standards and Technology (NIST), America, first reported Random Ball Test (RBT), which is used to measure the absolute error of the reference surface of the interferometer. The basic course of this technology as followed: first, assemble the Random Ball in the confocal position of the interferometer system; then, measure the surface of the Random Ball and record the result; rotate the Random Ball to another position, meanwhile make sure that the Random Ball is in the confocal position all the time; In the new position, measure the surface of the Random Ball and record it again; repeat enough times as above, calculate the mean result of the measuring results, and this mean result is just the absolute error of the reference surface of the interferometer. Since 1998, other scholars have continued Robert E.Parks's research, and created a new type of the RBT. In this new technology, Random Ball is sustained by high pressure airflow, suspending in the air, and rotating around sphere center. This technology is called Dynamic Random Ball Test (DRBT), because the Random Ball is rotating during measurement. This article mainly reported the experiment study about the DRBT. © 2012 SPIE.
英文摘要: Robert E.Parks from National Institute of Standards and Technology (NIST), America, first reported Random Ball Test (RBT), which is used to measure the absolute error of the reference surface of the interferometer. The basic course of this technology as followed: first, assemble the Random Ball in the confocal position of the interferometer system; then, measure the surface of the Random Ball and record the result; rotate the Random Ball to another position, meanwhile make sure that the Random Ball is in the confocal position all the time; In the new position, measure the surface of the Random Ball and record it again; repeat enough times as above, calculate the mean result of the measuring results, and this mean result is just the absolute error of the reference surface of the interferometer. Since 1998, other scholars have continued Robert E.Parks's research, and created a new type of the RBT. In this new technology, Random Ball is sustained by high pressure airflow, suspending in the air, and rotating around sphere center. This technology is called Dynamic Random Ball Test (DRBT), because the Random Ball is rotating during measurement. This article mainly reported the experiment study about the DRBT. © 2012 SPIE.
收录类别: Ei
语种: 英语
卷号: 8417
ISSN号: 0277786X
文章类型: 会议论文
页码: 84170X
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7593
Appears in Collections:先光中心_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate School, Chinese Academy of Sciences, Beijing 100049, China

Recommended Citation:
Lu, Liming,Wu, Fan,Hou, Xi,et al. Analysis and experiment of random ball test[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2012.
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