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Elimination of the "imprinting effect" of the lightweight aspheric polished by CCAL technology using immersed inflation
Zhong, Xianyun; Xu, Qinglan; Fan, Bin; Zhou, Jiabin; Zhong, X.
Volume8416
Pages841629
2012
Language英语
ISSN0277786X
DOI10.1117/12.975957
Indexed ByEi
Subtype会议论文
AbstractIn order to reduce the quality of overall optical system and improve the capability of correcting aberration, amending image quality and expanding the field of view. The optical components of optical systems are trending to the lightweight aspheric with larger radius to thickness ratio. For improving the processing efficiently and restraining the mid-high frequency error, Computer Control Active Lap (CCAL) technology has become a significant method for processing. However, when the surface accuracy RMS of lightweight mirrors is lower than λ / 40 (λ = 632.8nm), the lightweight mirror surface will appear "imprinting effect" stripes caused by Active Lap, and this phenomena has become the barriers for high-precision processing and the development of lightweight mirrors. In this paper, based on the Finite Element Analysis (FEA) software, taking an innovative way that applies reverse air to the internal structure of lightweight mirrors to resist the elastic deflection derived from the lap pressure and self-weight. And, comparing two methods: cavity inflation and immersed inflation, simulation results show that the immersion inflation method not only can eliminate the "imprinting effect, but also the surface accuracy of mirrors is much better than that only caused by selfweight during polishing process. © 2012 SPIE.; In order to reduce the quality of overall optical system and improve the capability of correcting aberration, amending image quality and expanding the field of view. The optical components of optical systems are trending to the lightweight aspheric with larger radius to thickness ratio. For improving the processing efficiently and restraining the mid-high frequency error, Computer Control Active Lap (CCAL) technology has become a significant method for processing. However, when the surface accuracy RMS of lightweight mirrors is lower than λ / 40 (λ = 632.8nm), the lightweight mirror surface will appear "imprinting effect" stripes caused by Active Lap, and this phenomena has become the barriers for high-precision processing and the development of lightweight mirrors. In this paper, based on the Finite Element Analysis (FEA) software, taking an innovative way that applies reverse air to the internal structure of lightweight mirrors to resist the elastic deflection derived from the lap pressure and self-weight. And, comparing two methods: cavity inflation and immersed inflation, simulation results show that the immersion inflation method not only can eliminate the "imprinting effect, but also the surface accuracy of mirrors is much better than that only caused by selfweight during polishing process. © 2012 SPIE.
Conference NameProceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7586
Collection先光中心
Corresponding AuthorZhong, X.
Affiliation Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
Recommended Citation
GB/T 7714
Zhong, Xianyun,Xu, Qinglan,Fan, Bin,et al. Elimination of the "imprinting effect" of the lightweight aspheric polished by CCAL technology using immersed inflation[C],2012:841629.
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