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题名:
Study on the best arrangement of sensors used in the deformation measurement of active lap based on Genetic Algorithm
作者: Zhao, Hongshen1,2; Li, Xiaojin1; Zeng, Zhige1
出版日期: 2012
会议名称: Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
会议日期: 2012
DOI: 10.1117/12.974278
通讯作者: Zhao, H.
中文摘要: The deformation measurement of active lap before being used to polish the mirror is one of the key factors that restrict the mirror's quality. Usually micro displacement sensors are used to measure the deformation. The sensors are located on a square grid or a circle array, but different arrangements of sensor array bring different accuracies. Which arrangement is the best for the measuring is unknown at present. A method of calculating the best arrangement of the sensor array is put forward. Firstly, Zernike polynomial is used to represent and reconstruct the lap surface, meanwhile, the variables concerned such as the number of sensor circles and the sensor number of each circle are shown. Secondly, we choose the RMS of measurement error as the standard to judge whether an arrangement is better or worse. Thirdly, Genetic Algorithm is widely used in optimization, especially in the optimization with a lot of variables. Here using the Genetic Algorithm we can successfully achieve a better arrangement of the sensors after some generations' evolution. The result shows that using the optimized arrangement can improve the measurement accuracy. Examples shown can prove the theory is correct. © 2012 SPIE.
英文摘要: The deformation measurement of active lap before being used to polish the mirror is one of the key factors that restrict the mirror's quality. Usually micro displacement sensors are used to measure the deformation. The sensors are located on a square grid or a circle array, but different arrangements of sensor array bring different accuracies. Which arrangement is the best for the measuring is unknown at present. A method of calculating the best arrangement of the sensor array is put forward. Firstly, Zernike polynomial is used to represent and reconstruct the lap surface, meanwhile, the variables concerned such as the number of sensor circles and the sensor number of each circle are shown. Secondly, we choose the RMS of measurement error as the standard to judge whether an arrangement is better or worse. Thirdly, Genetic Algorithm is widely used in optimization, especially in the optimization with a lot of variables. Here using the Genetic Algorithm we can successfully achieve a better arrangement of the sensors after some generations' evolution. The result shows that using the optimized arrangement can improve the measurement accuracy. Examples shown can prove the theory is correct. © 2012 SPIE.
收录类别: Ei
语种: 英语
卷号: 8416
ISSN号: 0277786X
文章类型: 会议论文
页码: 84161Y
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7585
Appears in Collections:先光中心_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China
2. Graduate University, Chinese Academy of Sciences, Beijing, 100049, China

Recommended Citation:
Zhao, Hongshen,Li, Xiaojin,Zeng, Zhige. Study on the best arrangement of sensors used in the deformation measurement of active lap based on Genetic Algorithm[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. 2012.
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