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Study on the best arrangement of sensors used in the deformation measurement of active lap based on Genetic Algorithm
Zhao, Hongshen1,2; Li, Xiaojin1; Zeng, Zhige1; Zhao, H.
Volume8416
Pages84161Y
2012
Language英语
ISSN0277786X
DOI10.1117/12.974278
Indexed ByEi
Subtype会议论文
AbstractThe deformation measurement of active lap before being used to polish the mirror is one of the key factors that restrict the mirror's quality. Usually micro displacement sensors are used to measure the deformation. The sensors are located on a square grid or a circle array, but different arrangements of sensor array bring different accuracies. Which arrangement is the best for the measuring is unknown at present. A method of calculating the best arrangement of the sensor array is put forward. Firstly, Zernike polynomial is used to represent and reconstruct the lap surface, meanwhile, the variables concerned such as the number of sensor circles and the sensor number of each circle are shown. Secondly, we choose the RMS of measurement error as the standard to judge whether an arrangement is better or worse. Thirdly, Genetic Algorithm is widely used in optimization, especially in the optimization with a lot of variables. Here using the Genetic Algorithm we can successfully achieve a better arrangement of the sensors after some generations' evolution. The result shows that using the optimized arrangement can improve the measurement accuracy. Examples shown can prove the theory is correct. © 2012 SPIE.; The deformation measurement of active lap before being used to polish the mirror is one of the key factors that restrict the mirror's quality. Usually micro displacement sensors are used to measure the deformation. The sensors are located on a square grid or a circle array, but different arrangements of sensor array bring different accuracies. Which arrangement is the best for the measuring is unknown at present. A method of calculating the best arrangement of the sensor array is put forward. Firstly, Zernike polynomial is used to represent and reconstruct the lap surface, meanwhile, the variables concerned such as the number of sensor circles and the sensor number of each circle are shown. Secondly, we choose the RMS of measurement error as the standard to judge whether an arrangement is better or worse. Thirdly, Genetic Algorithm is widely used in optimization, especially in the optimization with a lot of variables. Here using the Genetic Algorithm we can successfully achieve a better arrangement of the sensors after some generations' evolution. The result shows that using the optimized arrangement can improve the measurement accuracy. Examples shown can prove the theory is correct. © 2012 SPIE.
Conference NameProceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7585
Collection先光中心
Corresponding AuthorZhao, H.
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China
2. Graduate University, Chinese Academy of Sciences, Beijing, 100049, China
Recommended Citation
GB/T 7714
Zhao, Hongshen,Li, Xiaojin,Zeng, Zhige,et al. Study on the best arrangement of sensors used in the deformation measurement of active lap based on Genetic Algorithm[C],2012:84161Y.
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