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Thermal-structural-optical analysis for the lens of high-precision interferometer
Zhang, Juan; Wu, Yong-Qian; Wu, Fan; Zhang, J.
Volume8416
Pages84162E
2012
Language英语
ISSN0277786X
DOI10.1117/12.974282
Indexed ByEi
Subtype会议论文
AbstractThermal/Structural/Optical (TSO) integrated analysis is used for simulating the deformation of the interferometer lens which is caused by temperature, support structure and gravity.The FEA model is established to make structure analysis and thermal analysis, and the temperature data is transformed to the analysis model to make thermal elastic analysis. Secondly, fitting out of the coefficients into the optical design software program for system evaluation of image quality with Zernike polynomial as a interface tool and evaluating the influence of temperature load on optical system performance. Reasonable thermal control methods are expected to effectively reduce the temperature gradients and improve image quality. The results shows that the wave front aberration of the system achieved is better than λ/50 (RMS) with the temperature difference should be less than ± 0.015°C in mirror axis direction which can be fulfilled with the image quality demand under the support method. Besides, the data offered here will be useful for a reasonable design of the High-precision Interferometer lens. © 2012 SPIE.; Thermal/Structural/Optical (TSO) integrated analysis is used for simulating the deformation of the interferometer lens which is caused by temperature, support structure and gravity.The FEA model is established to make structure analysis and thermal analysis, and the temperature data is transformed to the analysis model to make thermal elastic analysis. Secondly, fitting out of the coefficients into the optical design software program for system evaluation of image quality with Zernike polynomial as a interface tool and evaluating the influence of temperature load on optical system performance. Reasonable thermal control methods are expected to effectively reduce the temperature gradients and improve image quality. The results shows that the wave front aberration of the system achieved is better than λ/50 (RMS) with the temperature difference should be less than ± 0.015°C in mirror axis direction which can be fulfilled with the image quality demand under the support method. Besides, the data offered here will be useful for a reasonable design of the High-precision Interferometer lens. © 2012 SPIE.
Conference NameProceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7583
Collection先光中心
Corresponding AuthorZhang, J.
Affiliation Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
Recommended Citation
GB/T 7714
Zhang, Juan,Wu, Yong-Qian,Wu, Fan,et al. Thermal-structural-optical analysis for the lens of high-precision interferometer[C],2012:84162E.
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