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Optimization of the edge extension in dwell time algorithm for ion beam figuring
Shu, Liangxuan1,2; Wu, Fan1; Shi, Chunyan1; Shu, L.
Volume8416
Pages84162M
2012
Language英语
ISSN0277786X
DOI10.1117/12.974277
Indexed ByEi
Subtype会议论文
AbstractIon beam figuring is capacity of removing materials at atoms, and the optical quality after polishing depends on not only the accuracy of processing but also the accuracy of dwell time algorithm. Deconvolution is a common method of determining the dwell time and it is generally carried out by matrix operations in the computer, so the surface figure of the optical component needs to be extended to cover throughout the matrix. First, this paper analyses the disadvantages of the extension by zero setting and Gaussian extension. And then based on the principle of matrix convolution an optimization method for the edge extension is proposed, which predicts the desired surface figure by the convolution of points in the workpiece. Finally, the simulations for ion beam figuring with Gauss extension and the optimization method proposed are made, and the results show that the optimization method taken into account the action of inner points has the better effect: the edge effect is suppressed more effectively and the algorithm achieves higher accuracy. © 2012 SPIE.; Ion beam figuring is capacity of removing materials at atoms, and the optical quality after polishing depends on not only the accuracy of processing but also the accuracy of dwell time algorithm. Deconvolution is a common method of determining the dwell time and it is generally carried out by matrix operations in the computer, so the surface figure of the optical component needs to be extended to cover throughout the matrix. First, this paper analyses the disadvantages of the extension by zero setting and Gaussian extension. And then based on the principle of matrix convolution an optimization method for the edge extension is proposed, which predicts the desired surface figure by the convolution of points in the workpiece. Finally, the simulations for ion beam figuring with Gauss extension and the optimization method proposed are made, and the results show that the optimization method taken into account the action of inner points has the better effect: the edge effect is suppressed more effectively and the algorithm achieves higher accuracy. © 2012 SPIE.
Conference NameProceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7580
Collection先光中心
Corresponding AuthorShu, L.
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate School, Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Shu, Liangxuan,Wu, Fan,Shi, Chunyan,et al. Optimization of the edge extension in dwell time algorithm for ion beam figuring[C],2012:84162M.
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