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题名:
Optimization of the edge extension in dwell time algorithm for ion beam figuring
作者: Shu, Liangxuan1,2; Wu, Fan1; Shi, Chunyan1
出版日期: 2012
会议名称: Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
会议日期: 2012
DOI: 10.1117/12.974277
通讯作者: Shu, L.
中文摘要: Ion beam figuring is capacity of removing materials at atoms, and the optical quality after polishing depends on not only the accuracy of processing but also the accuracy of dwell time algorithm. Deconvolution is a common method of determining the dwell time and it is generally carried out by matrix operations in the computer, so the surface figure of the optical component needs to be extended to cover throughout the matrix. First, this paper analyses the disadvantages of the extension by zero setting and Gaussian extension. And then based on the principle of matrix convolution an optimization method for the edge extension is proposed, which predicts the desired surface figure by the convolution of points in the workpiece. Finally, the simulations for ion beam figuring with Gauss extension and the optimization method proposed are made, and the results show that the optimization method taken into account the action of inner points has the better effect: the edge effect is suppressed more effectively and the algorithm achieves higher accuracy. © 2012 SPIE.
英文摘要: Ion beam figuring is capacity of removing materials at atoms, and the optical quality after polishing depends on not only the accuracy of processing but also the accuracy of dwell time algorithm. Deconvolution is a common method of determining the dwell time and it is generally carried out by matrix operations in the computer, so the surface figure of the optical component needs to be extended to cover throughout the matrix. First, this paper analyses the disadvantages of the extension by zero setting and Gaussian extension. And then based on the principle of matrix convolution an optimization method for the edge extension is proposed, which predicts the desired surface figure by the convolution of points in the workpiece. Finally, the simulations for ion beam figuring with Gauss extension and the optimization method proposed are made, and the results show that the optimization method taken into account the action of inner points has the better effect: the edge effect is suppressed more effectively and the algorithm achieves higher accuracy. © 2012 SPIE.
收录类别: Ei
语种: 英语
卷号: 8416
ISSN号: 0277786X
文章类型: 会议论文
页码: 84162M
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7580
Appears in Collections:先光中心_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate School, Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Shu, Liangxuan,Wu, Fan,Shi, Chunyan. Optimization of the edge extension in dwell time algorithm for ion beam figuring[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. 2012.
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