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Reconstructing in laser wavelength scanning interference test of aspheric surface
Li, Lulu1,2; Zhao, Wenchuan1; Su, Xianyu2; Wu, Fan1; Fan, Bin1; Li, L.
Volume8416
Pages841625
2012
Language英语
ISSN0277786X
DOI10.1117/12.2009280
Indexed ByEi
Subtype会议论文
AbstractLaser interferometry measurement using the volatility of light, with the advantages on high resolution, high accuracy, high sensitivity and reproducibility, it has become the primary means of the optical shape measurement. Laser wavelength scanning interference moves the test aspheric mirror in the optical axis direction controlled by the electric translation stage precisely, gradually changes the relative distance between the aspheric test mirror and the interferometer. Thus the reference sphere wavefronts with different radius match automatically to different ring-zones of the aspheric mirror. Based on the laser wavelength scanning interference testing of aspheric surface, this paper calculates the center area and the annular area separately. In the annular area processing, the authors use Zernike polynomials to fit the phase diagram, then derivative along the radial direction, to extract the zero-phase points on the interferogram of each relative position, and get the angle between the normal and the aspheric axis, then rebuild the absolute position of the coordinate system of aspheric mirror. Experimental results show that the method has high accuracy and reliability. © 2012 SPIE.; Laser interferometry measurement using the volatility of light, with the advantages on high resolution, high accuracy, high sensitivity and reproducibility, it has become the primary means of the optical shape measurement. Laser wavelength scanning interference moves the test aspheric mirror in the optical axis direction controlled by the electric translation stage precisely, gradually changes the relative distance between the aspheric test mirror and the interferometer. Thus the reference sphere wavefronts with different radius match automatically to different ring-zones of the aspheric mirror. Based on the laser wavelength scanning interference testing of aspheric surface, this paper calculates the center area and the annular area separately. In the annular area processing, the authors use Zernike polynomials to fit the phase diagram, then derivative along the radial direction, to extract the zero-phase points on the interferogram of each relative position, and get the angle between the normal and the aspheric axis, then rebuild the absolute position of the coordinate system of aspheric mirror. Experimental results show that the method has high accuracy and reliability. © 2012 SPIE.
Conference NameProceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7578
Collection先光中心
Corresponding AuthorLi, L.
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China
2. School of Electronics and Information Engineering, Sichuan University, Chengdu, 610065, China
Recommended Citation
GB/T 7714
Li, Lulu,Zhao, Wenchuan,Su, Xianyu,et al. Reconstructing in laser wavelength scanning interference test of aspheric surface[C],2012:841625.
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