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题名:
Reconstructing in laser wavelength scanning interference test of aspheric surface
作者: Li, Lulu1,2; Zhao, Wenchuan1; Su, Xianyu2; Wu, Fan1; Fan, Bin1
出版日期: 2012
会议名称: Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
会议日期: 2012
DOI: 10.1117/12.2009280
通讯作者: Li, L.
中文摘要: Laser interferometry measurement using the volatility of light, with the advantages on high resolution, high accuracy, high sensitivity and reproducibility, it has become the primary means of the optical shape measurement. Laser wavelength scanning interference moves the test aspheric mirror in the optical axis direction controlled by the electric translation stage precisely, gradually changes the relative distance between the aspheric test mirror and the interferometer. Thus the reference sphere wavefronts with different radius match automatically to different ring-zones of the aspheric mirror. Based on the laser wavelength scanning interference testing of aspheric surface, this paper calculates the center area and the annular area separately. In the annular area processing, the authors use Zernike polynomials to fit the phase diagram, then derivative along the radial direction, to extract the zero-phase points on the interferogram of each relative position, and get the angle between the normal and the aspheric axis, then rebuild the absolute position of the coordinate system of aspheric mirror. Experimental results show that the method has high accuracy and reliability. © 2012 SPIE.
英文摘要: Laser interferometry measurement using the volatility of light, with the advantages on high resolution, high accuracy, high sensitivity and reproducibility, it has become the primary means of the optical shape measurement. Laser wavelength scanning interference moves the test aspheric mirror in the optical axis direction controlled by the electric translation stage precisely, gradually changes the relative distance between the aspheric test mirror and the interferometer. Thus the reference sphere wavefronts with different radius match automatically to different ring-zones of the aspheric mirror. Based on the laser wavelength scanning interference testing of aspheric surface, this paper calculates the center area and the annular area separately. In the annular area processing, the authors use Zernike polynomials to fit the phase diagram, then derivative along the radial direction, to extract the zero-phase points on the interferogram of each relative position, and get the angle between the normal and the aspheric axis, then rebuild the absolute position of the coordinate system of aspheric mirror. Experimental results show that the method has high accuracy and reliability. © 2012 SPIE.
收录类别: Ei
语种: 英语
卷号: 8416
ISSN号: 0277786X
文章类型: 会议论文
页码: 841625
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7578
Appears in Collections:先光中心_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China
2. School of Electronics and Information Engineering, Sichuan University, Chengdu, 610065, China

Recommended Citation:
Li, Lulu,Zhao, Wenchuan,Su, Xianyu,et al. Reconstructing in laser wavelength scanning interference test of aspheric surface[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. 2012.
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