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题名:
Theoretical and experimental study on the active support
作者: Wu Yongqian; Wu Fan; Wu Gaofeng
出版日期: 2010
会议名称: Proceedings of the SPIE - The International Society for Optical Engineering
会议日期: 2010
通讯作者: Wu Yongqian
中文摘要: The model of the multiunit control system of flexible mirror is established. The studies have shown that the surface error can be reduced with multiunit active supports effectively. The experiment of active system of 31 units, Phi 300mm demonstrates the validation of the control algorithm, and reduces 90% of the error.
英文摘要: The model of the multiunit control system of flexible mirror is established. The studies have shown that the surface error can be reduced with multiunit active supports effectively. The experiment of active system of 31 units, Phi 300mm demonstrates the validation of the control algorithm, and reduces 90% of the error.
收录类别: Ei ; ISTP
语种: 英语
卷号: 7655
文章类型: 会议论文
页码: 76553J (7 pp.)
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7573
Appears in Collections:先光中心_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Wu Yongqian,Wu Fan,Wu Gaofeng. Theoretical and experimental study on the active support[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.
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