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Theoretical and experimental study on the active support
Wu Yongqian; Wu Fan; Wu Gaofeng
Volume7655
Pages76553J (7 pp.)
2010
Language英语
Indexed ByEi ; ISTP
Subtype会议论文
AbstractThe model of the multiunit control system of flexible mirror is established. The studies have shown that the surface error can be reduced with multiunit active supports effectively. The experiment of active system of 31 units, Phi 300mm demonstrates the validation of the control algorithm, and reduces 90% of the error.; The model of the multiunit control system of flexible mirror is established. The studies have shown that the surface error can be reduced with multiunit active supports effectively. The experiment of active system of 31 units, Phi 300mm demonstrates the validation of the control algorithm, and reduces 90% of the error.
Conference NameProceedings of the SPIE - The International Society for Optical Engineering
Conference Date2010
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7573
Collection先光中心
Corresponding AuthorWu Yongqian
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Wu Yongqian,Wu Fan,Wu Gaofeng. Theoretical and experimental study on the active support[C],2010:76553J (7 pp.).
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