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题名:
Research on middle and high spatial-frequency errors by discrete particles abrasion
作者: Wan Y.J.; Shi C.Y.; Yuan J.H.; Wu F.
出版日期: 2010
会议名称: Proceedings of the SPIE - The International Society for Optical Engineering
会议日期: 2010
通讯作者: Wan Y.J.
中文摘要: Based on the researches of abrasion mechanism by abrasive particle, the mechanism of formative middle and high spatial-frequency errors by discrete abrasive particle has been studied. Studies show that the errors are shaped by particle's movement track, the effect of particle pressure's asymmetry, and so on. If the particle act as sliding abrasion on workpiece, the movement track which produce spatial-frequency errors takes on helix. Experiments which are taken with a more rigid lap to restrain the slippage abrasion show that the spatial-frequency errors can be reduced when the particles behavior rolling abrasion on work piece in polishing process. Several factors make the particle pressure asymmetric, in order to reduce the spatial-frequency errors shaped by particle pressure's asymmetry, active semi-rigid tool which can be distorted to fit to the workpiece surface figure is designed to make the particle pressure symmetrical. Experiment with semi-rigid tool is taken, which shows that it can reduce spatial-frequency errors.
英文摘要: Based on the researches of abrasion mechanism by abrasive particle, the mechanism of formative middle and high spatial-frequency errors by discrete abrasive particle has been studied. Studies show that the errors are shaped by particle's movement track, the effect of particle pressure's asymmetry, and so on. If the particle act as sliding abrasion on workpiece, the movement track which produce spatial-frequency errors takes on helix. Experiments which are taken with a more rigid lap to restrain the slippage abrasion show that the spatial-frequency errors can be reduced when the particles behavior rolling abrasion on work piece in polishing process. Several factors make the particle pressure asymmetric, in order to reduce the spatial-frequency errors shaped by particle pressure's asymmetry, active semi-rigid tool which can be distorted to fit to the workpiece surface figure is designed to make the particle pressure symmetrical. Experiment with semi-rigid tool is taken, which shows that it can reduce spatial-frequency errors.
收录类别: Ei ; ISTP
语种: 英语
卷号: 7655
文章类型: 会议论文
页码: 765511 (5 pp.)
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7570
Appears in Collections:先光中心_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Wan Y.J.,Shi C.Y.,Yuan J.H.,et al. Research on middle and high spatial-frequency errors by discrete particles abrasion[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.
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