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Research on middle and high spatial-frequency errors by discrete particles abrasion
Wan Y.J.; Shi C.Y.; Yuan J.H.; Wu F.
Volume7655
Pages765511 (5 pp.)
2010
Language英语
Indexed ByEi ; ISTP
Subtype会议论文
AbstractBased on the researches of abrasion mechanism by abrasive particle, the mechanism of formative middle and high spatial-frequency errors by discrete abrasive particle has been studied. Studies show that the errors are shaped by particle's movement track, the effect of particle pressure's asymmetry, and so on. If the particle act as sliding abrasion on workpiece, the movement track which produce spatial-frequency errors takes on helix. Experiments which are taken with a more rigid lap to restrain the slippage abrasion show that the spatial-frequency errors can be reduced when the particles behavior rolling abrasion on work piece in polishing process. Several factors make the particle pressure asymmetric, in order to reduce the spatial-frequency errors shaped by particle pressure's asymmetry, active semi-rigid tool which can be distorted to fit to the workpiece surface figure is designed to make the particle pressure symmetrical. Experiment with semi-rigid tool is taken, which shows that it can reduce spatial-frequency errors.; Based on the researches of abrasion mechanism by abrasive particle, the mechanism of formative middle and high spatial-frequency errors by discrete abrasive particle has been studied. Studies show that the errors are shaped by particle's movement track, the effect of particle pressure's asymmetry, and so on. If the particle act as sliding abrasion on workpiece, the movement track which produce spatial-frequency errors takes on helix. Experiments which are taken with a more rigid lap to restrain the slippage abrasion show that the spatial-frequency errors can be reduced when the particles behavior rolling abrasion on work piece in polishing process. Several factors make the particle pressure asymmetric, in order to reduce the spatial-frequency errors shaped by particle pressure's asymmetry, active semi-rigid tool which can be distorted to fit to the workpiece surface figure is designed to make the particle pressure symmetrical. Experiment with semi-rigid tool is taken, which shows that it can reduce spatial-frequency errors.
Conference NameProceedings of the SPIE - The International Society for Optical Engineering
Conference Date2010
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7570
Collection先光中心
Corresponding AuthorWan Y.J.
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Wan Y.J.,Shi C.Y.,Yuan J.H.,et al. Research on middle and high spatial-frequency errors by discrete particles abrasion[C],2010:765511 (5 pp.).
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