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题名:
Misalignment model used in three-position absolute measurement
作者: Yang Peng; Wu Fan; Hou Xi
出版日期: 2010
会议名称: Proceedings of the SPIE - The International Society for Optical Engineering
会议日期: 2010
通讯作者: Yang Peng
中文摘要: Interferometric measurement, as dominating testing methods, is widely used in the field of optical measurement. Conventional interferometer subjects to many factors which make the measurement accuracy between lambda /10 and lambda /20, so it's difficult to meet the surface testing requirements of high accuracy. Thus the three-position absolute measurement technique is used to remove the errors which are introduced by reference surface and interferometer itself. The detailed process and experiment of three-position absolute measurement are given. A misalignment model by rigid body theory is presented, and the corresponding influence on interferometric measurement result is analyzed. The simulation results by the presented model are compared with that of Zemax software. By comparing both simulation results, it confirms the feasibility of the misalignment model.
英文摘要: Interferometric measurement, as dominating testing methods, is widely used in the field of optical measurement. Conventional interferometer subjects to many factors which make the measurement accuracy between lambda /10 and lambda /20, so it's difficult to meet the surface testing requirements of high accuracy. Thus the three-position absolute measurement technique is used to remove the errors which are introduced by reference surface and interferometer itself. The detailed process and experiment of three-position absolute measurement are given. A misalignment model by rigid body theory is presented, and the corresponding influence on interferometric measurement result is analyzed. The simulation results by the presented model are compared with that of Zemax software. By comparing both simulation results, it confirms the feasibility of the misalignment model.
收录类别: Ei ; ISTP
语种: 英语
卷号: 7656
文章类型: 会议论文
页码: 765651 (5 pp.)
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7568
Appears in Collections:先光中心_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Yang Peng,Wu Fan,Hou Xi. Misalignment model used in three-position absolute measurement[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.
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