| Misalignment model used in three-position absolute measurement | |
| Yang Peng; Wu Fan; Hou Xi | |
| Volume | 7656 |
| Pages | 765651 (5 pp.) |
| 2010 | |
| Language | 英语 |
| Indexed By | Ei ; ISTP |
| Subtype | 会议论文 |
| Abstract | Interferometric measurement, as dominating testing methods, is widely used in the field of optical measurement. Conventional interferometer subjects to many factors which make the measurement accuracy between lambda /10 and lambda /20, so it's difficult to meet the surface testing requirements of high accuracy. Thus the three-position absolute measurement technique is used to remove the errors which are introduced by reference surface and interferometer itself. The detailed process and experiment of three-position absolute measurement are given. A misalignment model by rigid body theory is presented, and the corresponding influence on interferometric measurement result is analyzed. The simulation results by the presented model are compared with that of Zemax software. By comparing both simulation results, it confirms the feasibility of the misalignment model.; Interferometric measurement, as dominating testing methods, is widely used in the field of optical measurement. Conventional interferometer subjects to many factors which make the measurement accuracy between lambda /10 and lambda /20, so it's difficult to meet the surface testing requirements of high accuracy. Thus the three-position absolute measurement technique is used to remove the errors which are introduced by reference surface and interferometer itself. The detailed process and experiment of three-position absolute measurement are given. A misalignment model by rigid body theory is presented, and the corresponding influence on interferometric measurement result is analyzed. The simulation results by the presented model are compared with that of Zemax software. By comparing both simulation results, it confirms the feasibility of the misalignment model. |
| Conference Name | Proceedings of the SPIE - The International Society for Optical Engineering |
| Conference Date | 2010 |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7568 |
| Collection | 先光中心 |
| Corresponding Author | Yang Peng |
| Affiliation | 中国科学院光电技术研究所 |
| Recommended Citation GB/T 7714 | Yang Peng,Wu Fan,Hou Xi. Misalignment model used in three-position absolute measurement[C],2010:765651 (5 pp.). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2010-146.pdf（570KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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