| 题名: | Misalignment model used in three-position absolute measurement |
| 作者: | Yang Peng; Wu Fan; Hou Xi
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| 出版日期: | 2010
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| 会议名称: | Proceedings of the SPIE - The International Society for Optical Engineering
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| 会议日期: | 2010
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| 通讯作者: | Yang Peng
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| 中文摘要: | Interferometric measurement, as dominating testing methods, is widely used in the field of optical measurement. Conventional interferometer subjects to many factors which make the measurement accuracy between lambda /10 and lambda /20, so it's difficult to meet the surface testing requirements of high accuracy. Thus the three-position absolute measurement technique is used to remove the errors which are introduced by reference surface and interferometer itself. The detailed process and experiment of three-position absolute measurement are given. A misalignment model by rigid body theory is presented, and the corresponding influence on interferometric measurement result is analyzed. The simulation results by the presented model are compared with that of Zemax software. By comparing both simulation results, it confirms the feasibility of the misalignment model. |
| 英文摘要: | Interferometric measurement, as dominating testing methods, is widely used in the field of optical measurement. Conventional interferometer subjects to many factors which make the measurement accuracy between lambda /10 and lambda /20, so it's difficult to meet the surface testing requirements of high accuracy. Thus the three-position absolute measurement technique is used to remove the errors which are introduced by reference surface and interferometer itself. The detailed process and experiment of three-position absolute measurement are given. A misalignment model by rigid body theory is presented, and the corresponding influence on interferometric measurement result is analyzed. The simulation results by the presented model are compared with that of Zemax software. By comparing both simulation results, it confirms the feasibility of the misalignment model. |
| 收录类别: | Ei
; ISTP
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| 语种: | 英语
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| 卷号: | 7656
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| 文章类型: | 会议论文
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| 页码: | 765651 (5 pp.)
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| 内容类型: | 会议论文
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| URI标识: | http://ir.ioe.ac.cn/handle/181551/7568
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| Appears in Collections: | 先光中心_会议论文
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| 2010-146.pdf（570KB） | 会议论文 | -- | 限制开放 | | View
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| Recommended Citation: | |
Yang Peng,Wu Fan,Hou Xi. Misalignment model used in three-position absolute measurement[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.
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