IOE OpenIR  > 先光中心
Misalignment model used in three-position absolute measurement
Yang Peng; Wu Fan; Hou Xi
Volume7656
Pages765651 (5 pp.)
2010
Language英语
Indexed ByEi ; ISTP
Subtype会议论文
AbstractInterferometric measurement, as dominating testing methods, is widely used in the field of optical measurement. Conventional interferometer subjects to many factors which make the measurement accuracy between lambda /10 and lambda /20, so it's difficult to meet the surface testing requirements of high accuracy. Thus the three-position absolute measurement technique is used to remove the errors which are introduced by reference surface and interferometer itself. The detailed process and experiment of three-position absolute measurement are given. A misalignment model by rigid body theory is presented, and the corresponding influence on interferometric measurement result is analyzed. The simulation results by the presented model are compared with that of Zemax software. By comparing both simulation results, it confirms the feasibility of the misalignment model.; Interferometric measurement, as dominating testing methods, is widely used in the field of optical measurement. Conventional interferometer subjects to many factors which make the measurement accuracy between lambda /10 and lambda /20, so it's difficult to meet the surface testing requirements of high accuracy. Thus the three-position absolute measurement technique is used to remove the errors which are introduced by reference surface and interferometer itself. The detailed process and experiment of three-position absolute measurement are given. A misalignment model by rigid body theory is presented, and the corresponding influence on interferometric measurement result is analyzed. The simulation results by the presented model are compared with that of Zemax software. By comparing both simulation results, it confirms the feasibility of the misalignment model.
Conference NameProceedings of the SPIE - The International Society for Optical Engineering
Conference Date2010
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7568
Collection先光中心
Corresponding AuthorYang Peng
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Yang Peng,Wu Fan,Hou Xi. Misalignment model used in three-position absolute measurement[C],2010:765651 (5 pp.).
Files in This Item:
File Name/Size DocType Version Access License
2010-146.pdf(570KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Yang Peng]'s Articles
[Wu Fan]'s Articles
[Hou Xi]'s Articles
Baidu academic
Similar articles in Baidu academic
[Yang Peng]'s Articles
[Wu Fan]'s Articles
[Hou Xi]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Yang Peng]'s Articles
[Wu Fan]'s Articles
[Hou Xi]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.