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题名:
Grinding and Polishing technology by Computer Controlled Active Lap for Phi 1250mmF/1.5 Aspheric Mirror
作者: Fan Bin; Zeng Zhige; Li Xiaojin; Chen Qiang; Gao Pingqi; Zhou Jiabin; Wan Yongjian
出版日期: 2010
会议名称: Proceedings of the SPIE - The International Society for Optical Engineering
会议日期: 2010
通讯作者: Fan Bin
中文摘要: For large aspheric optical elements, Computer Controlled Active Lap(CCAL) manufacturing which developed in IOE (Institute of Optics and Electronics, Chinese Academy of Science), have some advantages such as higher manufacturing efficiency, lower middle-frequency and high-frequency errors comparing the fixed lapping technology and CCOS(Computer Controlled Optical Surface) technology. A paraboloid surface of Phi 1250mmF/1.5 was grinded by the active lap bonded with ceramic pills, as well as polished will pitch bonded active lap. During polishing processing a null lens was designed to test the paraboloid surface, the final testing data of RMS with ZYGO interferometer reached to 0.027 lambda ( lambda =0.6328 mu m).
英文摘要: For large aspheric optical elements, Computer Controlled Active Lap(CCAL) manufacturing which developed in IOE (Institute of Optics and Electronics, Chinese Academy of Science), have some advantages such as higher manufacturing efficiency, lower middle-frequency and high-frequency errors comparing the fixed lapping technology and CCOS(Computer Controlled Optical Surface) technology. A paraboloid surface of Phi 1250mmF/1.5 was grinded by the active lap bonded with ceramic pills, as well as polished will pitch bonded active lap. During polishing processing a null lens was designed to test the paraboloid surface, the final testing data of RMS with ZYGO interferometer reached to 0.027 lambda ( lambda =0.6328 mu m).
收录类别: Ei ; ISTP
语种: 英语
卷号: 7654
文章类型: 会议论文
页码: 765409 (6 pp.)
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7564
Appears in Collections:先光中心_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Fan Bin,Zeng Zhige,Li Xiaojin,et al. Grinding and Polishing technology by Computer Controlled Active Lap for Phi 1250mmF/1.5 Aspheric Mirror[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.
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