IOE OpenIR  > 先光中心
Application of Zernike polynomials to test large aspheric surfaces in the fine grinding stage
Yangfang Deng; Jianguan Tang; Fan Wu
Volume7656
Pages76563O (5 pp.)
2010
Language英语
Subtype会议论文
AbstractA quantitative method in the fine grinding stage on the base of self-made test system is presented and is investigated by the experiments is presented in the paper. The contact mechanical equipment measures aspheric vector heights directly by a long rail and high precision grating probe. After calibrating system error and preprocessing data, the surface shape error and wave-front aberration coefficients of aspheric mirror are obtained by Zernike polynomials wave-front fitting the collected discrete three-dimensional data. Comparison with Hartmann sensor test method through polishing the aspheric mirror, the accuracy of wave-front error is in approximate agreement with each other, and the accuracy can meet the requirement of larger aperture aspheric mirror in the fine grinding stage. By experiment investigation in the process of manufacture and test, the system can guide machining in the fine grinding stage. The measurement system shows the advantages of low costs, operating convenience, as well as high-speed calculation.; A quantitative method in the fine grinding stage on the base of self-made test system is presented and is investigated by the experiments is presented in the paper. The contact mechanical equipment measures aspheric vector heights directly by a long rail and high precision grating probe. After calibrating system error and preprocessing data, the surface shape error and wave-front aberration coefficients of aspheric mirror are obtained by Zernike polynomials wave-front fitting the collected discrete three-dimensional data. Comparison with Hartmann sensor test method through polishing the aspheric mirror, the accuracy of wave-front error is in approximate agreement with each other, and the accuracy can meet the requirement of larger aperture aspheric mirror in the fine grinding stage. By experiment investigation in the process of manufacture and test, the system can guide machining in the fine grinding stage. The measurement system shows the advantages of low costs, operating convenience, as well as high-speed calculation.
Conference NameProceedings of the SPIE - The International Society for Optical Engineering
Conference Date2010
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7562
Collection先光中心
Corresponding AuthorYangfang Deng
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Yangfang Deng,Jianguan Tang,Fan Wu. Application of Zernike polynomials to test large aspheric surfaces in the fine grinding stage[C],2010:76563O (5 pp.).
Files in This Item:
File Name/Size DocType Version Access License
2010-147.pdf(799KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Yangfang Deng]'s Articles
[Jianguan Tang]'s Articles
[Fan Wu]'s Articles
Baidu academic
Similar articles in Baidu academic
[Yangfang Deng]'s Articles
[Jianguan Tang]'s Articles
[Fan Wu]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Yangfang Deng]'s Articles
[Jianguan Tang]'s Articles
[Fan Wu]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.