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题名:
Application of Zernike polynomials to test large aspheric surfaces in the fine grinding stage
作者: Yangfang Deng; Jianguan Tang; Fan Wu
出版日期: 2010
会议名称: Proceedings of the SPIE - The International Society for Optical Engineering
会议日期: 2010
通讯作者: Yangfang Deng
中文摘要: A quantitative method in the fine grinding stage on the base of self-made test system is presented and is investigated by the experiments is presented in the paper. The contact mechanical equipment measures aspheric vector heights directly by a long rail and high precision grating probe. After calibrating system error and preprocessing data, the surface shape error and wave-front aberration coefficients of aspheric mirror are obtained by Zernike polynomials wave-front fitting the collected discrete three-dimensional data. Comparison with Hartmann sensor test method through polishing the aspheric mirror, the accuracy of wave-front error is in approximate agreement with each other, and the accuracy can meet the requirement of larger aperture aspheric mirror in the fine grinding stage. By experiment investigation in the process of manufacture and test, the system can guide machining in the fine grinding stage. The measurement system shows the advantages of low costs, operating convenience, as well as high-speed calculation.
英文摘要: A quantitative method in the fine grinding stage on the base of self-made test system is presented and is investigated by the experiments is presented in the paper. The contact mechanical equipment measures aspheric vector heights directly by a long rail and high precision grating probe. After calibrating system error and preprocessing data, the surface shape error and wave-front aberration coefficients of aspheric mirror are obtained by Zernike polynomials wave-front fitting the collected discrete three-dimensional data. Comparison with Hartmann sensor test method through polishing the aspheric mirror, the accuracy of wave-front error is in approximate agreement with each other, and the accuracy can meet the requirement of larger aperture aspheric mirror in the fine grinding stage. By experiment investigation in the process of manufacture and test, the system can guide machining in the fine grinding stage. The measurement system shows the advantages of low costs, operating convenience, as well as high-speed calculation.
语种: 英语
卷号: 7656
文章类型: 会议论文
页码: 76563O (5 pp.)
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7562
Appears in Collections:先光中心_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Yangfang Deng,Jianguan Tang,Fan Wu. Application of Zernike polynomials to test large aspheric surfaces in the fine grinding stage[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.
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