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Neural network based intelligent control for active stressed lap optical polishing process
Yang Li; Chen Minyou; Wana Yongjian; Wang Mingyu; Zhao Junhui; Fan Bin; Xie Kaigui
Volume7282
2009
Language英语
Indexed ByEi
Subtype会议论文
AbstractA neural network based intelligent controller for an optical polishing machine with 60cm diameter active stressed lap has been developed. This paper briefly introduces the shape control strategy of the stressed-lap based optical polishing system. The dynamic change of the surface shape of the stressed lap during the operating process of polishing a large aspheric optical surface is investigated. The principle and structure of neural network based shape control system are discussed. The relationship between the stressed lap driven forces and surface shape is analyzed in detail. The original data from the micro displacement sensor matrix were used to train the neural network model. Simulation results show that the proposed control model can precisely produce the combined driven forces upon given surface shape of the stressed lap and improve the deformation precision.; A neural network based intelligent controller for an optical polishing machine with 60cm diameter active stressed lap has been developed. This paper briefly introduces the shape control strategy of the stressed-lap based optical polishing system. The dynamic change of the surface shape of the stressed lap during the operating process of polishing a large aspheric optical surface is investigated. The principle and structure of neural network based shape control system are discussed. The relationship between the stressed lap driven forces and surface shape is analyzed in detail. The original data from the micro displacement sensor matrix were used to train the neural network model. Simulation results show that the proposed control model can precisely produce the combined driven forces upon given surface shape of the stressed lap and improve the deformation precision.
Conference NameProceedings of SPIE
Conference Date2009
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7560
Collection先光中心
Corresponding AuthorYang Li
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Yang Li,Chen Minyou,Wana Yongjian,et al. Neural network based intelligent control for active stressed lap optical polishing process[C],2009.
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