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Optical testing of large rough aspheric surface using far-infrared interferometer
Wu Yongqian; Zhang Yudong; Wu Fan
Volume7383
2009
Language英语
Indexed ByEi
Subtype会议论文
AbstractAn far-infrared interferometer which can test rough surface is presented. It is based on the optical configuration of classical Fizeau interferometer. In addition, the design and system performance of an infrared system is presented. Using the infrared system, the far-infrared interferometer is capable of testing rough aspheric surfaces. The measuring error(RMS) is less than λ/200 (λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror.; An far-infrared interferometer which can test rough surface is presented. It is based on the optical configuration of classical Fizeau interferometer. In addition, the design and system performance of an infrared system is presented. Using the infrared system, the far-infrared interferometer is capable of testing rough aspheric surfaces. The measuring error(RMS) is less than λ/200 (λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror.
Conference NameProceedings of SPIE International Symposium on Photoelectronic Detection and Imaging 2009 - Advances in Infrared Imaging and Applications
Conference Date2009
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7559
Collection先光中心
Corresponding AuthorWu Yongqian
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Wu Yongqian,Zhang Yudong,Wu Fan. Optical testing of large rough aspheric surface using far-infrared interferometer[C],2009.
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