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Far-infrared Fizeau interferometer for large aspheric mirror
Wu Yongqian; Zhang Yudong
Volume7281
2009
Language英语
Indexed ByEi
Subtype会议论文
AbstractThe design and system performance of a far-infrared interferometer with which to test rough aspheric surfaces are presented. It is based on the optical configuration of classical Fizeau interferometer. A CO2 laser is used as a light source operating at a 10.6μm wavelength. A He-Ne laser is introduced into the interferometer to solve problems concerning with alignment. The measuring error(RMS) of the interferometer is less than λ/200 (λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror.; The design and system performance of a far-infrared interferometer with which to test rough aspheric surfaces are presented. It is based on the optical configuration of classical Fizeau interferometer. A CO2 laser is used as a light source operating at a 10.6μm wavelength. A He-Ne laser is introduced into the interferometer to solve problems concerning with alignment. The measuring error(RMS) of the interferometer is less than λ/200 (λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror.
Conference NameProceedings of SPIE 2009 Symposium on Photonics and Optoelectronics Large Mirrors and Telescopes
Conference Date2009
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7557
Collection先光中心
Corresponding AuthorWu Yongqian
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Wu Yongqian,Zhang Yudong. Far-infrared Fizeau interferometer for large aspheric mirror[C],2009.
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