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Absolute testing of surface based on sub-Aperture stitching interferometry
Jia, Xin; Xu, Fuchao; Xie, Weimin; Xing, Tingwen
Volume9449
Pages944933
2015
Language英语
ISSN0277-786X
DOI10.1117/12.2081125
Indexed BySCI ; Ei
Subtype会议论文
AbstractLarge-Aperture optical elements are widely employed in high-power laser system, astronomy, and outer-space technology. Sub-Aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. Most of the commercial available sub-Aperture stitching interferometers measure the surface with a standard lens that produces a reference wavefront, and the precision of the interferometer is generally limited by the standard lens. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. In our paper we use the different sub-Apertures as the different flats to get the profile of the reference lens. Only two lens in the testing process which is fewer than the traditional 3-flat method. In the testing equipment, we add a reflective lens and a lens which can transparent and reflect to get the non rationally symmetric errors of the testing flat. The arithmetic is present in this paper which uses the absolute testing method to improve the testing accuracy of the sub-Aperture stitching interferometers by removing the errors caused by reference surface.. © 2015 SPIE.; Large-Aperture optical elements are widely employed in high-power laser system, astronomy, and outer-space technology. Sub-Aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. Most of the commercial available sub-Aperture stitching interferometers measure the surface with a standard lens that produces a reference wavefront, and the precision of the interferometer is generally limited by the standard lens. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. In our paper we use the different sub-Apertures as the different flats to get the profile of the reference lens. Only two lens in the testing process which is fewer than the traditional 3-flat method. In the testing equipment, we add a reflective lens and a lens which can transparent and reflect to get the non rationally symmetric errors of the testing flat. The arithmetic is present in this paper which uses the absolute testing method to improve the testing accuracy of the sub-Aperture stitching interferometers by removing the errors caused by reference surface.. © 2015 SPIE.
Conference NameProceedings of SPIE: International Conference on Photonics and Optical Engineering, icPOE 2014
Conference Date2015
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Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7503
Collection应用光学研究室(二室)
Affiliation Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
Recommended Citation
GB/T 7714
Jia, Xin,Xu, Fuchao,Xie, Weimin,et al. Absolute testing of surface based on sub-Aperture stitching interferometry[C],2015:944933.
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