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题名:
Absolute testing of surface based on sub-Aperture stitching interferometry
作者: Jia, Xin; Xu, Fuchao; Xie, Weimin; Xing, Tingwen
出版日期: 2015
会议名称: Proceedings of SPIE: International Conference on Photonics and Optical Engineering, icPOE 2014
会议日期: 2015
学科分类: Errors - High power lasers - Interferometers - Measurements - Optical testing - Surface testing
DOI: 10.1117/12.2081125
中文摘要: Large-Aperture optical elements are widely employed in high-power laser system, astronomy, and outer-space technology. Sub-Aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. Most of the commercial available sub-Aperture stitching interferometers measure the surface with a standard lens that produces a reference wavefront, and the precision of the interferometer is generally limited by the standard lens. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. In our paper we use the different sub-Apertures as the different flats to get the profile of the reference lens. Only two lens in the testing process which is fewer than the traditional 3-flat method. In the testing equipment, we add a reflective lens and a lens which can transparent and reflect to get the non rationally symmetric errors of the testing flat. The arithmetic is present in this paper which uses the absolute testing method to improve the testing accuracy of the sub-Aperture stitching interferometers by removing the errors caused by reference surface.. © 2015 SPIE.
英文摘要: Large-Aperture optical elements are widely employed in high-power laser system, astronomy, and outer-space technology. Sub-Aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. Most of the commercial available sub-Aperture stitching interferometers measure the surface with a standard lens that produces a reference wavefront, and the precision of the interferometer is generally limited by the standard lens. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. In our paper we use the different sub-Apertures as the different flats to get the profile of the reference lens. Only two lens in the testing process which is fewer than the traditional 3-flat method. In the testing equipment, we add a reflective lens and a lens which can transparent and reflect to get the non rationally symmetric errors of the testing flat. The arithmetic is present in this paper which uses the absolute testing method to improve the testing accuracy of the sub-Aperture stitching interferometers by removing the errors caused by reference surface.. © 2015 SPIE.
收录类别: SCI ; Ei
语种: 英语
卷号: 9449
ISSN号: 0277-786X
文章类型: 会议论文
页码: 944933
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7503
Appears in Collections:应用光学研究室(二室)_会议论文

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作者单位: Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China

Recommended Citation:
Jia, Xin,Xu, Fuchao,Xie, Weimin,et al. Absolute testing of surface based on sub-Aperture stitching interferometry[C]. 见:Proceedings of SPIE: International Conference on Photonics and Optical Engineering, icPOE 2014. 2015.
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