IOE OpenIR  > 应用光学研究室(二室)
Absolute testing of flats in sub-stitching interferometer by rotation-shift method
Jia, Xin; Xu, Fuchao; Xie, Weimin; Li, Yun; Xing, Tingwen
Volume9628
Pages962819
2015
Language英语
ISSN0277-786X
DOI10.1117/12.2191288
Indexed BySCI ; Ei
Subtype会议论文
AbstractMost of the commercial available sub-aperture stitching interferometers measure the surface with a standard lens that produces a reference wavefront, and the precision of the interferometer is generally limited by the standard lens. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. When the testing accuracy (repeatability and reproducibility) is close to 1nm, in addition to the reference surface, other factors will also affect the measuring accuracy such as environment, zoom magnification, stitching precision, tooling and fixture, the characteristics of optical materials and so on. We establish a stitching system in the thousand level cleanroom. The stitching system is including the Zygo interferometer, the motion system with Bilz active isolation system at level VC-F. We review the traditional absolute flat testing methods and emphasize the method of rotation-shift functions. According to the rotation-shift method we get the profile of the reference lens and the testing lens. The problem of the rotation-shift method is the tilt error. In the motion system, we control the tilt error no more than 4 second to reduce the error. In order to obtain higher testing accuracy, we analyze the influence surface shape measurement accuracy by recording the environment error with the fluke testing equipment. © 2015 SPIE.; Most of the commercial available sub-aperture stitching interferometers measure the surface with a standard lens that produces a reference wavefront, and the precision of the interferometer is generally limited by the standard lens. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. When the testing accuracy (repeatability and reproducibility) is close to 1nm, in addition to the reference surface, other factors will also affect the measuring accuracy such as environment, zoom magnification, stitching precision, tooling and fixture, the characteristics of optical materials and so on. We establish a stitching system in the thousand level cleanroom. The stitching system is including the Zygo interferometer, the motion system with Bilz active isolation system at level VC-F. We review the traditional absolute flat testing methods and emphasize the method of rotation-shift functions. According to the rotation-shift method we get the profile of the reference lens and the testing lens. The problem of the rotation-shift method is the tilt error. In the motion system, we control the tilt error no more than 4 second to reduce the error. In order to obtain higher testing accuracy, we analyze the influence surface shape measurement accuracy by recording the environment error with the fluke testing equipment. © 2015 SPIE.
Conference NameProceedings of SPIE - The International Society for Optical Engineering
Conference Date2015
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7502
Collection应用光学研究室(二室)
Affiliation Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
Recommended Citation
GB/T 7714
Jia, Xin,Xu, Fuchao,Xie, Weimin,et al. Absolute testing of flats in sub-stitching interferometer by rotation-shift method[C],2015:962819.
Files in This Item:
File Name/Size DocType Version Access License
2015-2160.pdf(594KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Jia, Xin]'s Articles
[Xu, Fuchao]'s Articles
[Xie, Weimin]'s Articles
Baidu academic
Similar articles in Baidu academic
[Jia, Xin]'s Articles
[Xu, Fuchao]'s Articles
[Xie, Weimin]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Jia, Xin]'s Articles
[Xu, Fuchao]'s Articles
[Xie, Weimin]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.