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题名:
Two-dimension lateral shearing interferometry with dual-mode
作者: Liu, Zhixiang1,2,3; Xin, Tingwen1; Jiang, Yadong2; Lv, Baobin1,2,3; Xu, Fuchao1
出版日期: 2015
会议名称: Proceedings of SPIE - The International Society for Optical Engineering
会议日期: 2015
学科分类: Aberrations - Fourier transforms - Interferometers - Interferometry - Optical systems - Phase shift - Shearing - Systems analysis - Units of measurement - Wavefronts
DOI: 10.1117/12.2189878
中文摘要: Lateral shearing interferometry is an attractive technique to measure the wavefront aberration of high numerical aperture optical systems, of which using two-dimensional grating can divide and shear the wavefront in two-dimension simultaneously. A two-dimension lateral shearing interferometer based on chessboard grating was designed, which can work in dual-mode: the phase shifting mode and the Fourier transform mode. In the phase shifting mode, the phase shifting was realized by moving chessboard grating along the shearing direction in the image plane. In the Fourier transform mode, the spatial carrier frequency was realized by positioning the grating at the Talbot distance of the objective image plane. An experimental setup was designed to measure a 10×, NA0.25 microscope objective at 632.8nm wavelength. The objective was measured by the experimental setup in dual-mode, the results showed that the wavefront of the objective was 0.172λ RMS; in the phase shifting mode, the repeatability (3σ) of RMS was 1.1mλ; in the Fourier transform mode, the repeatability (3σ) of RMS was 2.7mλ; after correcting the coordinates of the wavefront, the differences of Z5 to Z36 between phase shifting mode and the Fourier transform mode were better than 8mλ. © 2015 SPIE.
英文摘要: Lateral shearing interferometry is an attractive technique to measure the wavefront aberration of high numerical aperture optical systems, of which using two-dimensional grating can divide and shear the wavefront in two-dimension simultaneously. A two-dimension lateral shearing interferometer based on chessboard grating was designed, which can work in dual-mode: the phase shifting mode and the Fourier transform mode. In the phase shifting mode, the phase shifting was realized by moving chessboard grating along the shearing direction in the image plane. In the Fourier transform mode, the spatial carrier frequency was realized by positioning the grating at the Talbot distance of the objective image plane. An experimental setup was designed to measure a 10×, NA0.25 microscope objective at 632.8nm wavelength. The objective was measured by the experimental setup in dual-mode, the results showed that the wavefront of the objective was 0.172λ RMS; in the phase shifting mode, the repeatability (3σ) of RMS was 1.1mλ; in the Fourier transform mode, the repeatability (3σ) of RMS was 2.7mλ; after correcting the coordinates of the wavefront, the differences of Z5 to Z36 between phase shifting mode and the Fourier transform mode were better than 8mλ. © 2015 SPIE.
收录类别: SCI ; Ei
语种: 英语
卷号: 9628
ISSN号: 0277-786X
文章类型: 会议论文
页码: 962817
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7501
Appears in Collections:应用光学研究室(二室)_会议论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. University of Electronic Science and Technology of China, Chengdu, China
3. University of Chinese Academy of Sciences, Beijing, China

Recommended Citation:
Liu, Zhixiang,Xin, Tingwen,Jiang, Yadong,et al. Two-dimension lateral shearing interferometry with dual-mode[C]. 见:Proceedings of SPIE - The International Society for Optical Engineering. 2015.
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