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Experiment analysis of freeform testing based on absolute testing method
Xin, Jia; Fuchao, Xu; Tingwen, Xing
Volume9203
Pages920315
2014
Language英语
ISSN0277786X
DOI10.1117/12.2060496
Indexed ByEi
Subtype会议论文
AbstractRequirements for the measurement resolution in sub-nanometer range have become quite common which include not only the repeatability or reproducibility but also the absolute measurement accuracy. The wavefront error of lithographic projection lens must be very small. One method to reduce the wavefront error of lithographic projection lens which is also called object lens is to use the freeform lens. The spatial frequency of the freeform lens for wavefront compensating contains some medium spatial frequencies. The surface figure accuracy of freeform lens for compensation should be better than the projection lens's. We can also use spherical or aspherical freeform lens for compensation. The testing accuracy of spherical and aspherical lens is hard to achieve 1nm. The zernike polynomials of spherical and aspherical lens contain the power term and the lenses are hard to find the cat-eye in the aboluste testing. The ion beam figure system (IBF) is the best polishing machine for nanometer manufacture which polish the PV of 2um in several weeks or even months. Usually we use the PV 200nm lens for compensation. So that's why the freeform for compensation looks like a flat. We will show the testing experiment of the freeform and the testing problems. The freeform surface in the experiment is created by 66 Zernike polynomials which are based on the flat lens. The freeform flat is polished by the ion figuring machine of NTG. The environmental factors(such as temperature, vibration, humidity) are controlled well. The Zygo's interferometer Verifire Ashpere with absolute testing method is used to test the freeform. Position accuracy is a problem in optical testing and manufacture. The result of high accuracy testing can't be determined by one method, we need the different methods to compare among these results because these method will contain some defects which of the recently absolute testing method are discussed. © 2014 SPIE.; Requirements for the measurement resolution in sub-nanometer range have become quite common which include not only the repeatability or reproducibility but also the absolute measurement accuracy. The wavefront error of lithographic projection lens must be very small. One method to reduce the wavefront error of lithographic projection lens which is also called object lens is to use the freeform lens. The spatial frequency of the freeform lens for wavefront compensating contains some medium spatial frequencies. The surface figure accuracy of freeform lens for compensation should be better than the projection lens's. We can also use spherical or aspherical freeform lens for compensation. The testing accuracy of spherical and aspherical lens is hard to achieve 1nm. The zernike polynomials of spherical and aspherical lens contain the power term and the lenses are hard to find the cat-eye in the aboluste testing. The ion beam figure system (IBF) is the best polishing machine for nanometer manufacture which polish the PV of 2um in several weeks or even months. Usually we use the PV 200nm lens for compensation. So that's why the freeform for compensation looks like a flat. We will show the testing experiment of the freeform and the testing problems. The freeform surface in the experiment is created by 66 Zernike polynomials which are based on the flat lens. The freeform flat is polished by the ion figuring machine of NTG. The environmental factors(such as temperature, vibration, humidity) are controlled well. The Zygo's interferometer Verifire Ashpere with absolute testing method is used to test the freeform. Position accuracy is a problem in optical testing and manufacture. The result of high accuracy testing can't be determined by one method, we need the different methods to compare among these results because these method will contain some defects which of the recently absolute testing method are discussed. © 2014 SPIE.
Conference NameProceedings of SPIE: Interferometry XVII: Techniques and Analysis
Conference Date2014
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7496
Collection应用光学研究室(二室)
Corresponding AuthorXin, Jia
Affiliation Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
Recommended Citation
GB/T 7714
Xin, Jia,Fuchao, Xu,Tingwen, Xing. Experiment analysis of freeform testing based on absolute testing method[C],2014:920315.
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