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The impact of polarization on grating performance of the lateral shearing interferometer
Yao, Zhengpeng1,2; Liu, Xuefeng3; Xing, Tingwen1
Volume9282
Pages92822J
2014
Language英语
ISSN0277786X
DOI10.1117/12.2068814
Indexed ByEi
Subtype会议论文
AbstractWith the development of modern precision optical systems, optical detecting system requires the accuracy of wavefront aberration to arrive to sub-nanometer level. When the incident field with polarization information, the polarization information will have a significant impact on the accuracy of measurement results by interacting with polarization-sensitive optical components in the lateral shearing interferometer. We propose the integrated interferometer wavefront sensor (IIWS) system, which is based on the traditional lateral shearing interferometer. This wavefront is sheared by a two-dimension diffraction grating in our system, the two-dimension diffraction grating is the key element to analysis the metrology performance. When using a different grating period and shearing direction, the wavefront shearing and phase shifting with polarization information will produce different error, moreover the impact will vary in the different diffraction orders. In this paper, calculation is based on the finite difference time domain (FDTD) algorithm. When calculation of different polarization state distribution of the incident field, the interaction analysis of shearing phase shifted grating and incidence light play an important role in error analysis. Finally we can get the effect of polarization for grating performance. © 2014 SPIE.; With the development of modern precision optical systems, optical detecting system requires the accuracy of wavefront aberration to arrive to sub-nanometer level. When the incident field with polarization information, the polarization information will have a significant impact on the accuracy of measurement results by interacting with polarization-sensitive optical components in the lateral shearing interferometer. We propose the integrated interferometer wavefront sensor (IIWS) system, which is based on the traditional lateral shearing interferometer. This wavefront is sheared by a two-dimension diffraction grating in our system, the two-dimension diffraction grating is the key element to analysis the metrology performance. When using a different grating period and shearing direction, the wavefront shearing and phase shifting with polarization information will produce different error, moreover the impact will vary in the different diffraction orders. In this paper, calculation is based on the finite difference time domain (FDTD) algorithm. When calculation of different polarization state distribution of the incident field, the interaction analysis of shearing phase shifted grating and incidence light play an important role in error analysis. Finally we can get the effect of polarization for grating performance. © 2014 SPIE.
Conference NameProceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Conference Date2014
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7494
Collection应用光学研究室(二室)
Affiliation1. Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. University of Chinese Academy of Sciences, Beijing, China
3. Nanjing University of Science and Technology, Nanjing, China
Recommended Citation
GB/T 7714
Yao, Zhengpeng,Liu, Xuefeng,Xing, Tingwen. The impact of polarization on grating performance of the lateral shearing interferometer[C],2014:92822J.
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