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题名:
The impact of polarization on grating performance of the lateral shearing interferometer
作者: Yao, Zhengpeng1,2; Liu, Xuefeng3; Xing, Tingwen1
出版日期: 2014
会议名称: Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议日期: 2014
学科分类: Aberrations - Adaptive optics - Diffraction - Diffraction gratings - Error analysis - Finite difference time domain method - Interferometers - Manufacture - Optical systems - Optical testing - Phase shift - Polarization - Time domain analysis - Wavefronts
DOI: 10.1117/12.2068814
中文摘要: With the development of modern precision optical systems, optical detecting system requires the accuracy of wavefront aberration to arrive to sub-nanometer level. When the incident field with polarization information, the polarization information will have a significant impact on the accuracy of measurement results by interacting with polarization-sensitive optical components in the lateral shearing interferometer. We propose the integrated interferometer wavefront sensor (IIWS) system, which is based on the traditional lateral shearing interferometer. This wavefront is sheared by a two-dimension diffraction grating in our system, the two-dimension diffraction grating is the key element to analysis the metrology performance. When using a different grating period and shearing direction, the wavefront shearing and phase shifting with polarization information will produce different error, moreover the impact will vary in the different diffraction orders. In this paper, calculation is based on the finite difference time domain (FDTD) algorithm. When calculation of different polarization state distribution of the incident field, the interaction analysis of shearing phase shifted grating and incidence light play an important role in error analysis. Finally we can get the effect of polarization for grating performance. © 2014 SPIE.
英文摘要: With the development of modern precision optical systems, optical detecting system requires the accuracy of wavefront aberration to arrive to sub-nanometer level. When the incident field with polarization information, the polarization information will have a significant impact on the accuracy of measurement results by interacting with polarization-sensitive optical components in the lateral shearing interferometer. We propose the integrated interferometer wavefront sensor (IIWS) system, which is based on the traditional lateral shearing interferometer. This wavefront is sheared by a two-dimension diffraction grating in our system, the two-dimension diffraction grating is the key element to analysis the metrology performance. When using a different grating period and shearing direction, the wavefront shearing and phase shifting with polarization information will produce different error, moreover the impact will vary in the different diffraction orders. In this paper, calculation is based on the finite difference time domain (FDTD) algorithm. When calculation of different polarization state distribution of the incident field, the interaction analysis of shearing phase shifted grating and incidence light play an important role in error analysis. Finally we can get the effect of polarization for grating performance. © 2014 SPIE.
收录类别: Ei
语种: 英语
卷号: 9282
ISSN号: 0277786X
文章类型: 会议论文
页码: 92822J
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7494
Appears in Collections:应用光学研究室(二室)_会议论文

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作者单位: 1. Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. University of Chinese Academy of Sciences, Beijing, China
3. Nanjing University of Science and Technology, Nanjing, China

Recommended Citation:
Yao, Zhengpeng,Liu, Xuefeng,Xing, Tingwen. The impact of polarization on grating performance of the lateral shearing interferometer[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2014.
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