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题名:
Absolute testing of flats with all terms by using even and odd functions
作者: Jia, Xin; Xu, Fuchao; Xing, Tingwen; Liu, Zhixiang
出版日期: 2013
会议名称: Proceedings of SPIE: Modeling Aspects in Optical Metrology IV, 2013
会议日期: 2013
学科分类: Measurements - Molecular physics - Optical testing
DOI: 10.1117/12.2019722
中文摘要: In Cartesian coordinate system, a flat can be expressed as the sum of even-odd, odd-even, even-even and oddodd functions. In the traditional three-flat even and odd function method, odd-odd function is difficult to obtain. In our paper the odd-odd function can be solved by use the Dove prism which can rotate the optical axis. The odd-odd function can calculate exactly. The even-odd, odd-even, even-even can be solved by rotating the flat 180 like the traditional method. Only five configurations are used to test the flats. The theoretical derivation and analysis are presented. © 2013 SPIE.
英文摘要: In Cartesian coordinate system, a flat can be expressed as the sum of even-odd, odd-even, even-even and oddodd functions. In the traditional three-flat even and odd function method, odd-odd function is difficult to obtain. In our paper the odd-odd function can be solved by use the Dove prism which can rotate the optical axis. The odd-odd function can calculate exactly. The even-odd, odd-even, even-even can be solved by rotating the flat 180 like the traditional method. Only five configurations are used to test the flats. The theoretical derivation and analysis are presented. © 2013 SPIE.
收录类别: Ei
语种: 英语
卷号: 8789
ISSN号: 0277786X
文章类型: 会议论文
页码: 878911
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7478
Appears in Collections:应用光学研究室(二室)_会议论文

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作者单位: Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

Recommended Citation:
Jia, Xin,Xu, Fuchao,Xing, Tingwen,et al. Absolute testing of flats with all terms by using even and odd functions[C]. 见:Proceedings of SPIE: Modeling Aspects in Optical Metrology IV, 2013. 2013.
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