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Design and location deviation of the computer generated holograms used for aspheric surface testing
Feng, Jie1,2; Deng, Chao1; Xing, Tingwen1
Volume8788
Pages87882O
2013
Language英语
ISSN0277786X
DOI10.1117/12.2019864
Indexed ByEi
Subtype会议论文
AbstractComputer generated holograms (CGHs) are widely used in aspheric surface testing and metrology. The primary role of the CGHs is to generate any desired wavefronts to realize phase compensation. In order to eliminate alignment errors of CGH and the tested aspheric, this paper designs a new layout of CGH that has the advantages of high alignment accuracy and simple experimental operation. And further the influence of the location deviation of CGH and the tested aspheric mirror to the entire system is discussed; it shows that the error introduced by the CGH and the tested aspheric mirror tilting around the x-axis or y-axis as well as the tested aspheric mirror moving along the x-axis or y-axis direction is large. Then the CGH design principle and design process are reviewed. Finally, a CGH is designed for measurement of an aspheric mirror (diameter=226mm, F-number =2.2). Interferometric test results of an aspheric mirror show that the whole test system obtains the demanded high accuracy. © 2013 SPIE.; Computer generated holograms (CGHs) are widely used in aspheric surface testing and metrology. The primary role of the CGHs is to generate any desired wavefronts to realize phase compensation. In order to eliminate alignment errors of CGH and the tested aspheric, this paper designs a new layout of CGH that has the advantages of high alignment accuracy and simple experimental operation. And further the influence of the location deviation of CGH and the tested aspheric mirror to the entire system is discussed; it shows that the error introduced by the CGH and the tested aspheric mirror tilting around the x-axis or y-axis as well as the tested aspheric mirror moving along the x-axis or y-axis direction is large. Then the CGH design principle and design process are reviewed. Finally, a CGH is designed for measurement of an aspheric mirror (diameter=226mm, F-number =2.2). Interferometric test results of an aspheric mirror show that the whole test system obtains the demanded high accuracy. © 2013 SPIE.
Conference NameProceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII
Conference Date2013
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7476
Collection应用光学研究室(二室)
Affiliation1. Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100049, China
Recommended Citation
GB/T 7714
Feng, Jie,Deng, Chao,Xing, Tingwen. Design and location deviation of the computer generated holograms used for aspheric surface testing[C],2013:87882O.
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