IOE OpenIR  > 应用光学研究室(二室)
Experiment analysis of absolute flatness testing
Xin, Jia; Xing, Tingwen; Lin, Wumei; Liao, Zhijie; Xin, J. (jiaxinhust@yahoo.com.cn)
Volume8324
Pages83242X
2012
Language英语
ISSN0277786X
DOI10.1117/12.916371
Indexed ByEi
Subtype会议论文
AbstractResult of the testing contain the reference surface errors and test surface errors in the high-accuracy Phase shifting interferometer which test the relative phase between the two surface. The test accuracy can be achieved by removing the error of reference surface. In this case, one of body of so-called absolute testing must be used which can test the systematic errors, including the reference surface, of the instrument to be used to improve the test accuracy. The accuracy of the interferometer needs different methods to determine in the high accuracy testing. Even-Odd function method and rotation shear method is introduced in this paper. We use the Zygo interferometer Verifire Asphere to do the experiment and analyze the errors caused by data processing and interpolation. The result of the experiment can determine the accuracy of our arithmetic. © 2012 SPIE.; Result of the testing contain the reference surface errors and test surface errors in the high-accuracy Phase shifting interferometer which test the relative phase between the two surface. The test accuracy can be achieved by removing the error of reference surface. In this case, one of body of so-called absolute testing must be used which can test the systematic errors, including the reference surface, of the instrument to be used to improve the test accuracy. The accuracy of the interferometer needs different methods to determine in the high accuracy testing. Even-Odd function method and rotation shear method is introduced in this paper. We use the Zygo interferometer Verifire Asphere to do the experiment and analyze the errors caused by data processing and interpolation. The result of the experiment can determine the accuracy of our arithmetic. © 2012 SPIE.
Conference NameProceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXVI
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7470
Collection应用光学研究室(二室)
Corresponding AuthorXin, J. (jiaxinhust@yahoo.com.cn)
Affiliation Lab. of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
Recommended Citation
GB/T 7714
Xin, Jia,Xing, Tingwen,Lin, Wumei,et al. Experiment analysis of absolute flatness testing[C],2012:83242X.
Files in This Item:
File Name/Size DocType Version Access License
2012-2159.pdf(602KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Xin, Jia]'s Articles
[Xing, Tingwen]'s Articles
[Lin, Wumei]'s Articles
Baidu academic
Similar articles in Baidu academic
[Xin, Jia]'s Articles
[Xing, Tingwen]'s Articles
[Lin, Wumei]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Xin, Jia]'s Articles
[Xing, Tingwen]'s Articles
[Lin, Wumei]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.