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题名:
Error analysis of sub-aperture stitching interferometry
作者: Jia, Xin; Xu, Fuchao; Xie, Weimin; Xing, Tingwen
出版日期: 2012
会议名称: Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议日期: 2012
DOI: 10.1117/12.977639
通讯作者: Jia, X.
中文摘要: Large-aperture optical elements are widely employed in high-power laser system, astronomy, and outer-space technology. Sub-aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. With the aim to provide the accuracy of equipment, this paper simulates the arithmetic to analyze the errors. The Selection of stitching mode and setting of the number of subaperture is given. According to the programmed algorithms simulation stitching is performed for testing the algorithm. In this paper, based on the Matlab we simulate the arithmetic of Sub-aperture stitching. The sub-aperture stitching method can also be used to test the free formed surface. The freeformed surface is created by Zernike polynomials. The accuracy has relationship with the errors of tilting, positioning. Through the stitching the medium spatial frequency of the surface can be tested. The results of errors analysis by means of Matlab are shown that how the tilting and positioning errors to influence the testing accuracy. The analysis of errors can also be used in other interferometer systems. © 2012 SPIE.
英文摘要: Large-aperture optical elements are widely employed in high-power laser system, astronomy, and outer-space technology. Sub-aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. With the aim to provide the accuracy of equipment, this paper simulates the arithmetic to analyze the errors. The Selection of stitching mode and setting of the number of subaperture is given. According to the programmed algorithms simulation stitching is performed for testing the algorithm. In this paper, based on the Matlab we simulate the arithmetic of Sub-aperture stitching. The sub-aperture stitching method can also be used to test the free formed surface. The freeformed surface is created by Zernike polynomials. The accuracy has relationship with the errors of tilting, positioning. Through the stitching the medium spatial frequency of the surface can be tested. The results of errors analysis by means of Matlab are shown that how the tilting and positioning errors to influence the testing accuracy. The analysis of errors can also be used in other interferometer systems. © 2012 SPIE.
收录类别: Ei
语种: 英语
卷号: 8417
ISSN号: 0277786X
文章类型: 会议论文
页码: 84172X
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7465
Appears in Collections:应用光学研究室(二室)_会议论文

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作者单位: Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

Recommended Citation:
Jia, Xin,Xu, Fuchao,Xie, Weimin,et al. Error analysis of sub-aperture stitching interferometry[C]. 见:Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2012.
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