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Research on method of measuring pattern distortion of circularly symmetrical phase etched CGHs and eliminating the effect of pattern distortion
Deng, Chao1; Feng, Jie1,2; Xing, Tingwen1; Deng, C.
Volume8418
Pages84180V
2012
Language英语
ISSN0277786X
DOI10.1117/12.975793
Indexed ByEi
Subtype会议论文
AbstractCircularly symmetrical phase etched computer-generated hologram (CGH) are widely used to test aspheric surface. In CGH fabrication errors, pattern distortion errors not only strongly affect the test precision but also can't be facilely eliminated. In order to improve the test accuracy of system, a moire´ fringes method is described for testing circularly symmetrical pattern distortion. Compared with the conventional method of using microdensitometer, the new method is more accurate and quicker for measuring the pattern distortion. Then, based on the accurate measurement of CGH pattern distortion, the impact on test accuracy that pattern distortion brings is eliminated with synthetic wavefront error map. Finally, through computer simulating, it is proved that the new method can effectively reduce the impact on test accuracy that pattern distortion brings. © 2012 SPIE.; Circularly symmetrical phase etched computer-generated hologram (CGH) are widely used to test aspheric surface. In CGH fabrication errors, pattern distortion errors not only strongly affect the test precision but also can't be facilely eliminated. In order to improve the test accuracy of system, a moire´ fringes method is described for testing circularly symmetrical pattern distortion. Compared with the conventional method of using microdensitometer, the new method is more accurate and quicker for measuring the pattern distortion. Then, based on the accurate measurement of CGH pattern distortion, the impact on test accuracy that pattern distortion brings is eliminated with synthetic wavefront error map. Finally, through computer simulating, it is proved that the new method can effectively reduce the impact on test accuracy that pattern distortion brings. © 2012 SPIE.
Conference NameProceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Conference Date2012
Citation statistics
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7459
Collection应用光学研究室(二室)
Corresponding AuthorDeng, C.
Affiliation1. Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate School of the Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Deng, Chao,Feng, Jie,Xing, Tingwen,et al. Research on method of measuring pattern distortion of circularly symmetrical phase etched CGHs and eliminating the effect of pattern distortion[C],2012:84180V.
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