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题名:
Error analysis of absolute interferometric testing based on reconstruction of rotational shear
作者: Jia, Xin; Xing, Ting-Wen
出版日期: 2012
会议名称: Advanced Materials Research, Sustainable Construction Materials and Computer Engineering,2011 International Conference on Sustainable Construction Materials and Computer Engineering, ICSCMCE2011
会议日期: 2012
DOI: 10.4028/www.scientific.net/AMR.346.620
通讯作者: Jia, X. (Chinajiaxinhust@yahoo.com.cn)
中文摘要: Recently most of modern absolute measurement rotation the flats or spheres in the interferometer. We review traditional absolute testing of flats methods and emphasize the method of reconstruction of rotational shear. The rotation of the lens can lead to some errors such as angle rotation error, center excursion error and other coordinate system motion error. 36 Zernike polynomials are used to generate 3 flats and Matlab are used to simulate the arithmetic. There have some phase problems on FFT arithmetic in Matlab which can cause some errors. Results are shown about how these errors influence the accuracy. The analysis results can also be used in other interferometer systems which have the motion of the coordinate system. © (2012) Trans Tech Publications, Switzerland.
英文摘要: Recently most of modern absolute measurement rotation the flats or spheres in the interferometer. We review traditional absolute testing of flats methods and emphasize the method of reconstruction of rotational shear. The rotation of the lens can lead to some errors such as angle rotation error, center excursion error and other coordinate system motion error. 36 Zernike polynomials are used to generate 3 flats and Matlab are used to simulate the arithmetic. There have some phase problems on FFT arithmetic in Matlab which can cause some errors. Results are shown about how these errors influence the accuracy. The analysis results can also be used in other interferometer systems which have the motion of the coordinate system. © (2012) Trans Tech Publications, Switzerland.
收录类别: Ei
语种: 英语
卷号: 346
ISSN号: 10226680
文章类型: 会议论文
页码: 620-626
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7458
Appears in Collections:应用光学研究室(二室)_会议论文

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作者单位: Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

Recommended Citation:
Jia, Xin,Xing, Ting-Wen. Error analysis of absolute interferometric testing based on reconstruction of rotational shear[C]. 见:Advanced Materials Research, Sustainable Construction Materials and Computer Engineering,2011 International Conference on Sustainable Construction Materials and Computer Engineering, ICSCMCE2011. 2012.
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