中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 应用光学研究室(二室)  > 会议论文
题名:
Vibration errors in phase-shifting interferometer with absolute testing
作者: Jia Xin; Xing Tingwen
出版日期: 2011
会议名称: Proc. of SPIE
会议日期: 2011
通讯作者: Jia Xin
中文摘要: Requirements for the measurement resolution in the sub-nanometer range have become quite common. Result of the testing contain the reference surface errors and test surface errors in the high-accuracy Phase shifting interferometer (PSI) which test the relative phase between the two surface. The test accuracy can be achieved by removing the error of reference surface. In this case, one of body of so-called absolute tests must be used which can test the systematic errors, including the reference surface, of the instrument to be used to improve the test accuracy. Unexpected mechanical vibrations can significantly degrade the otherwise high accuracy of phase-shifting interferometer. The data acquisition is sensitivity to vibration with a function of the frequency. The influence of the longitudinal vibration is analyzed in this paper. We use Zernike polynomials to generate 3 plats. Then the Matlab is used to simulate the 4 frames phase-shift algorithms and absolute testing algorithms. An experiment used the Zygo interferometer to prove the arithmetic and we can see the vibration errors in the testing.
英文摘要: Requirements for the measurement resolution in the sub-nanometer range have become quite common. Result of the testing contain the reference surface errors and test surface errors in the high-accuracy Phase shifting interferometer (PSI) which test the relative phase between the two surface. The test accuracy can be achieved by removing the error of reference surface. In this case, one of body of so-called absolute tests must be used which can test the systematic errors, including the reference surface, of the instrument to be used to improve the test accuracy. Unexpected mechanical vibrations can significantly degrade the otherwise high accuracy of phase-shifting interferometer. The data acquisition is sensitivity to vibration with a function of the frequency. The influence of the longitudinal vibration is analyzed in this paper. We use Zernike polynomials to generate 3 plats. Then the Matlab is used to simulate the 4 frames phase-shift algorithms and absolute testing algorithms. An experiment used the Zygo interferometer to prove the arithmetic and we can see the vibration errors in the testing.
收录类别: Ei
语种: 英语
卷号: 8321
文章类型: 会议论文
页码: 83212M-1-M-7
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7454
Appears in Collections:应用光学研究室(二室)_会议论文

Files in This Item:
File Name/ File Size Content Type Version Access License
2011-02-005.pdf(1456KB)会议论文--限制开放View 联系获取全文

作者单位: 中国科学院光电技术研究所

Recommended Citation:
Jia Xin,Xing Tingwen. Vibration errors in phase-shifting interferometer with absolute testing[C]. 见:Proc. of SPIE. 2011.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Jia Xin]'s Articles
[Xing Tingwen]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Jia Xin]‘s Articles
[Xing Tingwen]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: 2011-02-005.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace