| Vibration errors in phase-shifting interferometer with absolute testing | |
| Jia Xin; Xing Tingwen | |
| Volume | 8321 |
| Pages | 83212M-1－M-7 |
| 2011 | |
| Language | 英语 |
| Indexed By | Ei |
| Subtype | 会议论文 |
| Abstract | Requirements for the measurement resolution in the sub-nanometer range have become quite common. Result of the testing contain the reference surface errors and test surface errors in the high-accuracy Phase shifting interferometer (PSI) which test the relative phase between the two surface. The test accuracy can be achieved by removing the error of reference surface. In this case, one of body of so-called absolute tests must be used which can test the systematic errors, including the reference surface, of the instrument to be used to improve the test accuracy. Unexpected mechanical vibrations can significantly degrade the otherwise high accuracy of phase-shifting interferometer. The data acquisition is sensitivity to vibration with a function of the frequency. The influence of the longitudinal vibration is analyzed in this paper. We use Zernike polynomials to generate 3 plats. Then the Matlab is used to simulate the 4 frames phase-shift algorithms and absolute testing algorithms. An experiment used the Zygo interferometer to prove the arithmetic and we can see the vibration errors in the testing.; Requirements for the measurement resolution in the sub-nanometer range have become quite common. Result of the testing contain the reference surface errors and test surface errors in the high-accuracy Phase shifting interferometer (PSI) which test the relative phase between the two surface. The test accuracy can be achieved by removing the error of reference surface. In this case, one of body of so-called absolute tests must be used which can test the systematic errors, including the reference surface, of the instrument to be used to improve the test accuracy. Unexpected mechanical vibrations can significantly degrade the otherwise high accuracy of phase-shifting interferometer. The data acquisition is sensitivity to vibration with a function of the frequency. The influence of the longitudinal vibration is analyzed in this paper. We use Zernike polynomials to generate 3 plats. Then the Matlab is used to simulate the 4 frames phase-shift algorithms and absolute testing algorithms. An experiment used the Zygo interferometer to prove the arithmetic and we can see the vibration errors in the testing. |
| Conference Name | Proc. of SPIE |
| Conference Date | 2011 |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7454 |
| Collection | 应用光学研究室（二室） |
| Corresponding Author | Jia Xin |
| Affiliation | 中国科学院光电技术研究所 |
| Recommended Citation GB/T 7714 | Jia Xin,Xing Tingwen. Vibration errors in phase-shifting interferometer with absolute testing[C],2011:83212M-1－M-7. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2011-02-005.pdf（1456KB） | 会议论文 | 开放获取 | CC BY-NC-SA | Application Full Text | ||
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