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The machining precision analysis of the ion beam figuring system
Yun Li; Tingwen Xing; Xin Jia; Jiajun Xu
Volume8321
2011
Language英语
Indexed ByEi
Subtype会议论文
AbstractThe ion beam figuring machine is a kind of high precise machining facility for optical components. In the field of optical fabrication, the machining precision is always an important capability for the machining facility. The basic structures and working principles of the ion beam figuring system are primarily introduced. And then, various errors which may reduce the final machining precision have been analyzed through theories analysis and computer simulations. The errors include: the approximate error from the discrete compute model to the actual continuum machining model; the system error and random error of the high precision 3-axis motion stage which drives the ion source; the system error and random error of the material removal rate of the ion source. A set of potential error parameters has been given for each part of the ion beam figuring system. By using this set of parameters, it is possible to reach the nano-level machining. The precision analysis in the paper will be a reference for ion beam figuring.; The ion beam figuring machine is a kind of high precise machining facility for optical components. In the field of optical fabrication, the machining precision is always an important capability for the machining facility. The basic structures and working principles of the ion beam figuring system are primarily introduced. And then, various errors which may reduce the final machining precision have been analyzed through theories analysis and computer simulations. The errors include: the approximate error from the discrete compute model to the actual continuum machining model; the system error and random error of the high precision 3-axis motion stage which drives the ion source; the system error and random error of the material removal rate of the ion source. A set of potential error parameters has been given for each part of the ion beam figuring system. By using this set of parameters, it is possible to reach the nano-level machining. The precision analysis in the paper will be a reference for ion beam figuring.
Conference NameProc. of SPIE
Conference Date2011
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7453
Collection应用光学研究室(二室)
Corresponding AuthorYun Li
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Yun Li,Tingwen Xing,Xin Jia,et al. The machining precision analysis of the ion beam figuring system[C],2011.
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2011-02-004.pdf(737KB)会议论文 开放获取CC BY-NC-SAApplication Full Text
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