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题名:
Filter model based dwell time algorithm for ion beam figuring
作者: Yun Li; Tingwen Xing; Xin Jia; Haoming Wei
出版日期: 2010
会议名称: Proceedings of the SPIE - The International Society for Optical Engineering
会议日期: 2010
通讯作者: Yun Li
中文摘要: The process of Ion Beam Figuring (IBF) can be described by a two-dimensional convolution equation which including dwell time. Solving the dwell time is a key problem in IBF. Theoretically, the dwell time can be solved from a two-dimensional deconvolution. However, it is often ill-posed; the suitable solution of that is hard to get. In this article, a dwell time algorithm is proposed, depending on the characters of IBF. Usually, the Beam Removal Function (BRF) in IBF is Gaussian, which can be regarded as a headstand Gaussian filter. In its stop-band, the filter has various filtering abilities for various frequencies. The dwell time algorithm proposed in this article is just based on this concept. The Curved Surface Smooth Extension (CSSE) method and Fast Fourier Transform (FFT) algorithm are also used. The simulation results show that this algorithm is high precision, effective, and suitable for actual application.
英文摘要: The process of Ion Beam Figuring (IBF) can be described by a two-dimensional convolution equation which including dwell time. Solving the dwell time is a key problem in IBF. Theoretically, the dwell time can be solved from a two-dimensional deconvolution. However, it is often ill-posed; the suitable solution of that is hard to get. In this article, a dwell time algorithm is proposed, depending on the characters of IBF. Usually, the Beam Removal Function (BRF) in IBF is Gaussian, which can be regarded as a headstand Gaussian filter. In its stop-band, the filter has various filtering abilities for various frequencies. The dwell time algorithm proposed in this article is just based on this concept. The Curved Surface Smooth Extension (CSSE) method and Fast Fourier Transform (FFT) algorithm are also used. The simulation results show that this algorithm is high precision, effective, and suitable for actual application.
收录类别: Ei ; ISTP
语种: 英语
卷号: 7655
文章类型: 会议论文
页码: 76551K (7 pp.)
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7448
Appears in Collections:应用光学研究室(二室)_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Yun Li,Tingwen Xing,Xin Jia,et al. Filter model based dwell time algorithm for ion beam figuring[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.
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