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Filter model based dwell time algorithm for ion beam figuring
Yun Li; Tingwen Xing; Xin Jia; Haoming Wei
Volume7655
Pages76551K (7 pp.)
2010
Language英语
Indexed ByEi ; ISTP
Subtype会议论文
AbstractThe process of Ion Beam Figuring (IBF) can be described by a two-dimensional convolution equation which including dwell time. Solving the dwell time is a key problem in IBF. Theoretically, the dwell time can be solved from a two-dimensional deconvolution. However, it is often ill-posed; the suitable solution of that is hard to get. In this article, a dwell time algorithm is proposed, depending on the characters of IBF. Usually, the Beam Removal Function (BRF) in IBF is Gaussian, which can be regarded as a headstand Gaussian filter. In its stop-band, the filter has various filtering abilities for various frequencies. The dwell time algorithm proposed in this article is just based on this concept. The Curved Surface Smooth Extension (CSSE) method and Fast Fourier Transform (FFT) algorithm are also used. The simulation results show that this algorithm is high precision, effective, and suitable for actual application.; The process of Ion Beam Figuring (IBF) can be described by a two-dimensional convolution equation which including dwell time. Solving the dwell time is a key problem in IBF. Theoretically, the dwell time can be solved from a two-dimensional deconvolution. However, it is often ill-posed; the suitable solution of that is hard to get. In this article, a dwell time algorithm is proposed, depending on the characters of IBF. Usually, the Beam Removal Function (BRF) in IBF is Gaussian, which can be regarded as a headstand Gaussian filter. In its stop-band, the filter has various filtering abilities for various frequencies. The dwell time algorithm proposed in this article is just based on this concept. The Curved Surface Smooth Extension (CSSE) method and Fast Fourier Transform (FFT) algorithm are also used. The simulation results show that this algorithm is high precision, effective, and suitable for actual application.
Conference NameProceedings of the SPIE - The International Society for Optical Engineering
Conference Date2010
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7448
Collection应用光学研究室(二室)
Corresponding AuthorYun Li
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Yun Li,Tingwen Xing,Xin Jia,et al. Filter model based dwell time algorithm for ion beam figuring[C],2010:76551K (7 pp.).
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