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题名:
Analysis of Absolute Testing based on Even-Odd Functions
作者: Jia Xin; Xing Tingwen; Lin wumei
出版日期: 2010
会议名称: Proceedings of the SPIE - The International Society for Optical Engineering
会议日期: 2010
通讯作者: Jia Xin
中文摘要: Recently most of modern absolute measurement methods rotate the flat or sphere in the interferometer. So it is very important to exactly know how some errors such as angle rotation error, center excursion error influence the metrology. This paper analyses these errors how to influence testing accuracy by Zernike based on Even-Odd functions. We review traditional absolute testing of flats methods and emphasize the method of even and odd functions. The flat can be expressed as the sum of even-odd, odd-even, even-even and odd-odd functions. Through six measurements the profile of the flat can be calculated. We use 36 Zernike polynomials in polar coordinates to analysis the method. The polynomials can be separated by even-odd, odd-even, even-even and odd-odd parts. We substitute polynomials for surface data and change the arithmetic. Then we can analyze the every surface error data and exactly know the calculate accuracy of every term through the arithmetic. The results of errors analyze by means of Matlab are shown that how the angle rotation error to influence the accuracy. The errors analysis can also be used in other interferometer systems which have the motion of the coordinate system.
英文摘要: Recently most of modern absolute measurement methods rotate the flat or sphere in the interferometer. So it is very important to exactly know how some errors such as angle rotation error, center excursion error influence the metrology. This paper analyses these errors how to influence testing accuracy by Zernike based on Even-Odd functions. We review traditional absolute testing of flats methods and emphasize the method of even and odd functions. The flat can be expressed as the sum of even-odd, odd-even, even-even and odd-odd functions. Through six measurements the profile of the flat can be calculated. We use 36 Zernike polynomials in polar coordinates to analysis the method. The polynomials can be separated by even-odd, odd-even, even-even and odd-odd parts. We substitute polynomials for surface data and change the arithmetic. Then we can analyze the every surface error data and exactly know the calculate accuracy of every term through the arithmetic. The results of errors analyze by means of Matlab are shown that how the angle rotation error to influence the accuracy. The errors analysis can also be used in other interferometer systems which have the motion of the coordinate system.
收录类别: Ei ; ISTP
语种: 英语
卷号: 7656
文章类型: 会议论文
页码: 76563E (6 pp.)
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7445
Appears in Collections:应用光学研究室(二室)_会议论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Jia Xin,Xing Tingwen,Lin wumei. Analysis of Absolute Testing based on Even-Odd Functions[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.
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