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Analysis of Absolute Testing based on Even-Odd Functions
Jia Xin; Xing Tingwen; Lin wumei
Volume7656
Pages76563E (6 pp.)
2010
Language英语
Indexed ByEi ; ISTP
Subtype会议论文
AbstractRecently most of modern absolute measurement methods rotate the flat or sphere in the interferometer. So it is very important to exactly know how some errors such as angle rotation error, center excursion error influence the metrology. This paper analyses these errors how to influence testing accuracy by Zernike based on Even-Odd functions. We review traditional absolute testing of flats methods and emphasize the method of even and odd functions. The flat can be expressed as the sum of even-odd, odd-even, even-even and odd-odd functions. Through six measurements the profile of the flat can be calculated. We use 36 Zernike polynomials in polar coordinates to analysis the method. The polynomials can be separated by even-odd, odd-even, even-even and odd-odd parts. We substitute polynomials for surface data and change the arithmetic. Then we can analyze the every surface error data and exactly know the calculate accuracy of every term through the arithmetic. The results of errors analyze by means of Matlab are shown that how the angle rotation error to influence the accuracy. The errors analysis can also be used in other interferometer systems which have the motion of the coordinate system.; Recently most of modern absolute measurement methods rotate the flat or sphere in the interferometer. So it is very important to exactly know how some errors such as angle rotation error, center excursion error influence the metrology. This paper analyses these errors how to influence testing accuracy by Zernike based on Even-Odd functions. We review traditional absolute testing of flats methods and emphasize the method of even and odd functions. The flat can be expressed as the sum of even-odd, odd-even, even-even and odd-odd functions. Through six measurements the profile of the flat can be calculated. We use 36 Zernike polynomials in polar coordinates to analysis the method. The polynomials can be separated by even-odd, odd-even, even-even and odd-odd parts. We substitute polynomials for surface data and change the arithmetic. Then we can analyze the every surface error data and exactly know the calculate accuracy of every term through the arithmetic. The results of errors analyze by means of Matlab are shown that how the angle rotation error to influence the accuracy. The errors analysis can also be used in other interferometer systems which have the motion of the coordinate system.
Conference NameProceedings of the SPIE - The International Society for Optical Engineering
Conference Date2010
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7445
Collection应用光学研究室(二室)
Corresponding AuthorJia Xin
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Jia Xin,Xing Tingwen,Lin wumei. Analysis of Absolute Testing based on Even-Odd Functions[C],2010:76563E (6 pp.).
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