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A quick algorithm of exposure distribution for fabrication of micro-optical structures
Li Shuhong; Du Chunlei; Fu Yongqi; Li SH (Li Shuhong)
Source PublicationOPTIK
Volume121Issue:11Pages:988-992
2010
Language英语
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7361
Collection微电子装备总体研究室(四室)
Corresponding AuthorLi SH (Li Shuhong)
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Li Shuhong,Du Chunlei,Fu Yongqi,et al. A quick algorithm of exposure distribution for fabrication of micro-optical structures[J]. OPTIK,2010,121(11):988-992.
APA Li Shuhong,Du Chunlei,Fu Yongqi,&Li SH .(2010).A quick algorithm of exposure distribution for fabrication of micro-optical structures.OPTIK,121(11),988-992.
MLA Li Shuhong,et al."A quick algorithm of exposure distribution for fabrication of micro-optical structures".OPTIK 121.11(2010):988-992.
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