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基于随机微透镜列阵的激光光束匀化方法
曹阿秀; 史立芳; 余金清; 庞辉; 张满; 邓启凌
Source Publication应用激光
Volume35Issue:1Pages:124-128
2015
Language中文
Subtype期刊论文
Abstract利用微透镜列阵实现光束的分割和叠加是一种典型的光束匀化方法。而在微透镜列阵实现激光光束匀化时,由于微透镜列阵的周期性和激光的相干性,匀化光斑会产生周期性点阵分布现象,降低了光束匀化质量。提出一种利用中心离轴型随机微透镜列阵消除点阵效应以实现激光光束的匀化方法。在分析光束经过微透镜列阵的传播特性基础上,设计列阵中各个子透镜单元的几何中心偏离其光轴,利用中心离轴量的随机性打破微透镜列阵的周期性,消除目标面处的点阵现象,实现高均匀性的光斑分布。采用移动掩模技术制备随机微透镜列阵,并开展激光光束匀化实验。结果表明,该方法能够有效提高激光光束的均匀性,有望在激光加工、医疗和照明等方向有较大的应用前景。
Keyword光学 光束匀化 随机微透镜列阵 激光
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7341
Collection微电子装备总体研究室(四室)
Corresponding Author曹阿秀
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
曹阿秀,史立芳,余金清,等. 基于随机微透镜列阵的激光光束匀化方法[J]. 应用激光,2015,35(1):124-128.
APA 曹阿秀,史立芳,余金清,庞辉,张满,&邓启凌.(2015).基于随机微透镜列阵的激光光束匀化方法.应用激光,35(1),124-128.
MLA 曹阿秀,et al."基于随机微透镜列阵的激光光束匀化方法".应用激光 35.1(2015):124-128.
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