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题名:
One exposure processing to fabricate spiral phase plate with continuous surface
作者: Shi, Lifang; Zhang, Zhiyou; Cao, Axiu; Luo, Xue; Deng, Qiling
刊名: Optics Express
出版日期: 2015
卷号: 23, 期号:7, 页码:8620-8629
DOI: 10.1364/OE.23.008620
通讯作者: Deng, QL (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China.
文章类型: 期刊论文
中文摘要: An economical method for fabricating spiral phase plate (SPP) with continuous surface is proposed in this paper. We use an interval to quantize a three dimensional surface of an SPP into two dimensional bars to form a binary mask. The exposure dose can be precisely distributed through this mask in the exposure process. We discuss the select criterion of the quantization interval and the fabricating processes of SPP in detail. In the results, we present the fabrication of four kinds of high quality SPPs with different topological charges. The morphology analysis and the corresponding optical measurements verify the reliability of our fabrication method. (C)2015 Optical Society of America
英文摘要: An economical method for fabricating spiral phase plate (SPP) with continuous surface is proposed in this paper. We use an interval to quantize a three dimensional surface of an SPP into two dimensional bars to form a binary mask. The exposure dose can be precisely distributed through this mask in the exposure process. We discuss the select criterion of the quantization interval and the fabricating processes of SPP in detail. In the results, we present the fabrication of four kinds of high quality SPPs with different topological charges. The morphology analysis and the corresponding optical measurements verify the reliability of our fabrication method. (C)2015 Optical Society of America
收录类别: SCI
语种: 英语
WOS记录号: WOS:000352290000065
ISSN号: 1094-4087
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7339
Appears in Collections:微电子装备总体研究室(四室)_期刊论文

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作者单位: 1.[Shi, Lifang
2.Cao, Axiu
3.Luo, Xue
4.Deng, Qiling] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
5.[Zhang, Zhiyou] Sichuan Univ, Minist Educ, Key Lab High Energy Dens Phys & Technol, Chengdu 610064, Sichuan, Peoples R China

Recommended Citation:
Shi, Lifang,Zhang, Zhiyou,Cao, Axiu,et al. One exposure processing to fabricate spiral phase plate with continuous surface[J]. Optics Express,2015,23(7):8620-8629.
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