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One exposure processing to fabricate spiral phase plate with continuous surface
Shi, Lifang; Zhang, Zhiyou; Cao, Axiu; Luo, Xue; Deng, Qiling; Deng, QL (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China.
Source PublicationOptics Express
Volume23Issue:7Pages:8620-8629
2015
Language英语
ISSN1094-4087
DOI10.1364/OE.23.008620
Indexed BySCI
WOS IDWOS:000352290000065
Subtype期刊论文
AbstractAn economical method for fabricating spiral phase plate (SPP) with continuous surface is proposed in this paper. We use an interval to quantize a three dimensional surface of an SPP into two dimensional bars to form a binary mask. The exposure dose can be precisely distributed through this mask in the exposure process. We discuss the select criterion of the quantization interval and the fabricating processes of SPP in detail. In the results, we present the fabrication of four kinds of high quality SPPs with different topological charges. The morphology analysis and the corresponding optical measurements verify the reliability of our fabrication method. (C)2015 Optical Society of America; An economical method for fabricating spiral phase plate (SPP) with continuous surface is proposed in this paper. We use an interval to quantize a three dimensional surface of an SPP into two dimensional bars to form a binary mask. The exposure dose can be precisely distributed through this mask in the exposure process. We discuss the select criterion of the quantization interval and the fabricating processes of SPP in detail. In the results, we present the fabrication of four kinds of high quality SPPs with different topological charges. The morphology analysis and the corresponding optical measurements verify the reliability of our fabrication method. (C)2015 Optical Society of America
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Cited Times:11[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7339
Collection微电子装备总体研究室(四室)
Corresponding AuthorDeng, QL (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China.
Affiliation1.[Shi, Lifang
2.Cao, Axiu
3.Luo, Xue
4.Deng, Qiling] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
5.[Zhang, Zhiyou] Sichuan Univ, Minist Educ, Key Lab High Energy Dens Phys & Technol, Chengdu 610064, Sichuan, Peoples R China
Recommended Citation
GB/T 7714
Shi, Lifang,Zhang, Zhiyou,Cao, Axiu,et al. One exposure processing to fabricate spiral phase plate with continuous surface[J]. Optics Express,2015,23(7):8620-8629.
APA Shi, Lifang,Zhang, Zhiyou,Cao, Axiu,Luo, Xue,Deng, Qiling,&Deng, QL .(2015).One exposure processing to fabricate spiral phase plate with continuous surface.Optics Express,23(7),8620-8629.
MLA Shi, Lifang,et al."One exposure processing to fabricate spiral phase plate with continuous surface".Optics Express 23.7(2015):8620-8629.
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